Two-Dimensional Device Simulation for Polycrystalline Silicon Thin-Film Transistor
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-12-20
著者
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Yamada So
Research Center For Integrated Systems Hiroshima University
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Yokoyama Shin
Research Center For Integrated Systems Hiroshima University
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Koyanagi Mitsumasa
Research Center For Integrated Systems Hiroshima University
関連論文
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- Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba,Sr)TiO_3 and Mechanism of Transient Response
- Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba_Sr_TiO_3 Thin Films
- Structural and Optical Properties of Electro-Optic Material : Sputtered (Ba,Sr)TiO_3
- High-Rate GaAs Epitaxial Lift-Off Technique for Optoelectronic Integrated Circuits
- High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
- Single-Chip Integration of Light-Emitting Diode, Waveguide and Micrormirrors
- Fabrication and Evaluation of Three-Dimensional Optically Coupled Common Memory
- Evaluation of Plasma-Induced Damage by Medium-Energy Ion Scattering
- BF^+_2 Ion Implantation into Very-Low-Temperature Si Wafer
- Chemical Bonding Features of Fluorine and Boron in BF^+_2 -Ion-Implanted Si
- Quantitative Evaluation of Dopant Loss in 5-10 keV As Ion Implantation for Low-Resistive, Ultrashallow Source/Drain Formation
- An Experimental Pattern Recognition System Using Bidirectional Optical Bus Lines
- Experimental Pattern Recognition System Using Bidirectional Optical Bus Lines
- High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
- New RAM-bus Memory System with Interchip Optical Interconnection
- Micron-Size Optical Waveguide for Optoelectronic Integrated Circuit
- Medium-Energy Ion Spectroscopy Using Ion Implanter
- New Ar-Plasma Cleaning Process for Reduction of Al/TiSi_2 Contact Resistance
- Bipolar Voltage Pulse Induced Current : A Means for Reliable Extraction of Interface Trap Distribution in Ultrathin Oxides MOS Structures
- Determination of Valence Band Alignment at Ultrathin SiO_2/Si Interfaces by High-Resolution X-Ray Photoelectron Spectroscopy
- Valence Band Alignment at Ultra-Thin SiO_2/Si(111) Interfaces as Determined by High-Resolution X-Ray Photoelectron Spectroscopy
- Valence Band Alignment at Ultra-Thin SiO_2/Si(111) Interfaces as Determined by High-Resolution X-Ray Photoelectron Spectroscopy
- Fabrication Technologies for Double-SiO_2-Barrier Metal-Oxide-Semiconductor Transistor with a Poly-Si Dot
- Calculation of Electrical Properties of Novel Double-Barrier Metal Oxide Semiconductor Transistors
- Effects of Hydrogen and Bias on Single-Crystal Al Growth on Vicinal Si by DC Magnetron Sputtering
- Influence of Organic Contaminant on Trap Generation in Thin SiO_2 of Metal-Oxide-Semiconductor Capacitors
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- Influence of Organic Contaminant on Breakdown Characteristics of MOS Capacitors with Thin SiO_2
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- Design and Simulation of Silicon Ring Optical Modulator with p/n Junctions along Circumference
- Sensitivity Improvement of Biosensors Using Si Ring Optical Resonators
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- A Study of Mach--Zehnder Interferometer Type Optical Modulator Applicable to an Accelerometer
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- Implanted Antimony Precipitation in Silicon Studied by Medium-Energy Ion Scattering
- Investigation of Surface Contamination on Silicon Oxide after Hydrofluoric Acid Etching by Noncontact Capacitance Method
- Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch
- Self-Limiting Atomic-Layer Selective Deposition of Silicon Nitride by Temperature-Controlled Method
- Compact Branched Optical Waveguides Using High-Index-Contrast Stacked Structure
- Stacked Optical Branched Waveguides for Optical Interconnection on Si Chips
- Single-Crystal Growth of Al(110) on Vicinal Si(100) in Ultra-High-Vacuum Sputtering System
- Influence of Sputtering Geometry on Crystallinity of Al(110) Thin Films on Offset (100)Si
- Race-Track Optical Ring Resonators with Groove Coupling
- Design and Simulation of Ring Resonator Switches using Electro-Optic Materials
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- Oplically Coupled Three-Dimensional Common Memory with Novel Data Transfer Method
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- Optically Interconnected Kohonen Net for Pattern Recognition
- Phosphorus-Assisted Low-Energy Arsenic Implantation Technology for N-Channel Metal–Oxide–Semiconductor Field-Effect Transistor Source/Drain Formation Process
- Organic Contamination Dependence of Process-Induced Interface Trap Generation in Ultrathin Oxide Metal Oxide Semiconductor Transistors
- Photoelastic Effect in Silicon Ring Resonators
- Evaluation of Front-Opening Unified Pod with Attached UV/Photocatalyst Cleaning Unit
- Effect of Light Irradiation on Native Oxidation of Silicon Surface
- Imprint Property of Optical Mach–Zehnder Interferometers Using (Ba,Sr)TiO3 Sputter-Deposited at 450 °C
- High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
- Fabrication of Spin-Coated Optical Waveguides for Optically Interconnected LSI and Influence of Fabrication Process on Underlying Metal–Oxide–Semiconductor Capacitors
- Compact Multimode Optical Ring Resonators for Interconnection on Silicon Chips
- Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Amorphous Ba0.7Sr0.3TiO3 Thin Films
- Structural and Optical Properties of Electro-Optic Material: Sputtered (Ba,Sr)TiO3
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- Effect of H2 Addition during Cu Thin-Film Sputtering