Fabrication of spin-coat optical waveguides for optically interconnected LSI and influence of fabrication process on lower layer MOS capacitors
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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YOKOYAMA Shin
Research Center for Nanodevices and Systems, Hiroshima University
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Yokoyama Shin
Research Center For Integrated Systems Hiroshima University
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SUNAMI Hideo
Research Center for Nanodevices and Systems, Hiroshima University
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Sunami Hideo
Research Center For Nanodevices And Systems Hiroshima University
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TABEI Tetsuo
Research Center for Nanodevices and Systems, Hiroshima University
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MAEDA Kazuhiko
Central Glass Co., LTD
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Tabei Tetsuo
Research Center For Nanodevices And Systems (rcns) Hiroshima University
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Tabei Tetsuo
Research Center For Nanodevices And Systems Hiroshima University
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Sunami Hideo
Research Center For Nanodevice And Systems Hiroshima University
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Maeda Kazuhiko
Central Glass Co. Ltd
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