High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
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概要
- 論文の詳細を見る
High efficiency compact mirrors and branched waveguides which can be integrated on LSI chips have been developed. The Al capped bent optical waveguides efficiently change the light direction. The Al capping also reduces the light propagation loss of the optical waveguide from 1.8 to 0.6 dB/cm. Various micromirror shapes have been investigated and a reflectivity of 81% has been obtained for a double-reflection micromirror with a corner radius of 34 µm. Using the micromirrors, compact four-branch waveguides have also been designed and fabricated.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1996-02-28
著者
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UEHARA Akihito
Research Center for Integrated Systems, Hiroshima University
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NAGATA Takahiko
Research Center for Integrated Systems, Hiroshima University
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IWATA Atushi
Department of Electrical Engineering, Hiroshima University
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Yokoyama Shin
Research Center For Integrated Systems Hiroshima University
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Miyazaki Seiichi
Department Of Electrical Engineering Graduate School Of Advanced Sciences And Matter Hiroshima Unive
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Namba Tohru
Research Center For Integrated Systems Hiroshima University
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Hirose Masataka
Research Center For Integrated Systems Hiroshima University
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Kuroda Yasuhide
Research Center For Integrated Systems Hiroshima University
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Doi Takeshi
Department Of Bio- And Geoscience Graduate School Of Science Osaka City University
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Shibahara Kentaro
Reseach Center for Nanodevices and Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashihiroshima, Hiroshima 739-8527, Japan
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Iwata Atushi
Department of Electrical Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima 739, Japan
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Uehara Akihito
Research Center for Integrated Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashi-Hiroshima 739, Japan
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Hirose Masataka
Research Center for Integrated Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashi-Hiroshima 739, Japan
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Kuroda Yasuhide
Research Center for Integrated Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashi-Hiroshima 739, Japan
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Miyazaki Seiichi
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Namba Tohru
Research Center for Integrated Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashi-Hiroshima 739, Japan
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Nagata Takahiko
Research Center for Integrated Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashi-Hiroshima 739, Japan
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