Medium-Energy Ion Spectroscopy Using Ion Implanter

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-07-01

著者

• Ishibashi Koji

  Department Of Applied Physics And Dimes Delft University Of Technology:the Institute Of Physical And

• YOKOYAMA Seiji

  School of Material Science, Japan Advanced Institute of Science and Technology

• YOKOYAMA Shin

  Research Center for Nanodevices and Systems, Hiroshima University

• Yokoyama Seiji

  School Of Material Science Japan Advanced Institute Of Science And Technology

• HIROSE Masataka

  Research Center for Integrated Systems, Hiroshima University

• RADZIMSKI Zbigniew

  Research Center for Integrated Systems, Hiroshima University

• ISHIBASHI Kensaku

  Faculty of Engineering, Hiroshima University

• NISHIYAMA Fumitaka

  Faculty of Engineering, Hiroshima University

• Nishiyama Fumitaka

  Faculty Of Engineering Hiroshima University

• Yokoyama Shin

  Research Center For Integrated Systems Hiroshima University

• Yokoyama S

  Research Center For Nanodevices And Systems Hiroshima University

• Radzimski Zbigniew

  Research Center For Integrated Systems Hiroshima University:(present Address)analytical Instrumentat

• Ishibashi K

  Advanced Device Laboratory The Institute Of Physical And Chemical Research (riken)

• Ishibashi K

  Department Of Applied Physics And Dimes Delft University Of Technology:the Institute Of Physical And

• Hirose M

  Materials Research Center Tdk Corporation

• Hirose Masataka

  Research Center For Integrated Systems Hiroshima University

• Yokoyama S

  Kyushu Univ. Fukuoka Jpn

関連論文

• Low Voltage Saturation of Ob(Zr_xTi_O_3 Films on(100)Ir/(100)(ZrO_2)_(Y_2O_3)_x/(100)Si Substrate Structure Prepared by Reactive Sputtering
• Modeling of Electron Transport in Corrugated Quantum Wires
• Ballistic Weak Localization and Wave Function Scarring in Quantum Wires
• Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited (Ba,Sr)TiO_3 at Low Temperature
• Low Temperature Fabrication of Monolithic Mach-Zehnder Optical Modulator on Silicon using Sputtered (Ba,Sr)TiO_3 and Mechanism of Transient Response
• Magnetic Analysis of Quadrupole Lens for MeV Ion Microprobe
• Is There a Magnetic-Field-Induced Breakdown in the Universality of Conductance Fluctuations?
• Structure and Optical Band-Gap Energies of Ba_Sr_TiO_3 Thin Films Fabricated by RF Magnetron Plasma Sputtering
• Groove-Buried Optical Waveguides Based on Metal Organic Solution-Derived Ba_Sr_TiO_3 Thin Films
• Structural and Optical Properties of Electro-Optic Material : Sputtered (Ba,Sr)TiO_3
• High-Rate GaAs Epitaxial Lift-Off Technique for Optoelectronic Integrated Circuits
• High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
• Single-Chip Integration of Light-Emitting Diode, Waveguide and Micrormirrors
• Fabrication and Evaluation of Three-Dimensional Optically Coupled Common Memory
• Evaluation of Plasma-Induced Damage by Medium-Energy Ion Scattering
• Chemical Bonding Features of Fluorine and Boron in BF^+_2 -Ion-Implanted Si
• Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch
• Quantitative Evaluation of Dopant Loss in 5-10 keV As Ion Implantation for Low-Resistive, Ultrashallow Source/Drain Formation
• An Experimental Pattern Recognition System Using Bidirectional Optical Bus Lines
• Experimental Pattern Recognition System Using Bidirectional Optical Bus Lines
• Optically Interconnected Kohonen Net for Pattern Recognition
• High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
• New RAM-bus Memory System with Interchip Optical Interconnection
• Micron-Size Optical Waveguide for Optoelectronic Integrated Circuit
• Medium-Energy Ion Spectroscopy Using Ion Implanter
• Phase Breaking of Coherent Electron Waves in Dot Array Systems ( Quantum Dot Structures)
• The Role of Electron Phase Coherence in Quantum Transport through Open Ballistic Cavities ( Quantum Dot Structures)
• Quantum Transport in Single and Multiple Quantum Dots ( Quantum Dot Structures)
• Carrier Transport in Nanodevices
• Trajectory Transition Due to Gate Depletion in Corrugation Gated Quantum Wires
• Carrier Transport in Nanoscale Structures
• Electron Wave Interference in Ballistic and Quasi-Ballistic Nanostructures
• Zero-Current Voltage Fluctuations in Quantum Dots at High Magnetic Fields
• Study of Scattering Processes in Quantum Wires by a Correlation Field Analysis of the Phase Coherent Interferences
• The Magnetic Field Dependent Characteristics of Conductance Fluctuations in Ballistic Quantum Dots
• Experimental Determination of the Conduction Width in Quasi Ballistic Wires
• Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography : Micro/nanofabrication and Devices
• Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography
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• 招待講演 Carbon nanotubes for quantum-dot devices
• 招待講演 Carbon nanotubes for quantum-dot devices
• Quantum Dots in Carbon Nanotubes
• Characterization of Small Superconducting Rings and Its Possible Application to New Single Flux Quantum Devices
• New Ar-Plasma Cleaning Process for Reduction of Al/TiSi_2 Contact Resistance
• Bipolar Voltage Pulse Induced Current : A Means for Reliable Extraction of Interface Trap Distribution in Ultrathin Oxides MOS Structures
• Determination of Valence Band Alignment at Ultrathin SiO_2/Si Interfaces by High-Resolution X-Ray Photoelectron Spectroscopy
• Valence Band Alignment at Ultra-Thin SiO_2/Si(111) Interfaces as Determined by High-Resolution X-Ray Photoelectron Spectroscopy
• Valence Band Alignment at Ultra-Thin SiO_2/Si(111) Interfaces as Determined by High-Resolution X-Ray Photoelectron Spectroscopy
• Crystalline Qualities and Critical Current Densities of As-Grown Ba_2YCu_3O_x Thin Films on Silicon with Buffer Layers
• Organic Contamination Dependence of Process-Induced Interface Trap Generation in Ultrathin Oxide Metal Oxide Semiconductor Transistors
• Fabrication Technologies for Double-SiO_2-Barrier Metal-Oxide-Semiconductor Transistor with a Poly-Si Dot
• Thickness Dependence of Material Properties of Epitaxial Pb(Zr_xTi_)O_3 Films on Ir/(100) (ZrO_2)_(Y_2O_3)_x(100)Si Structures
• Calculation of Electrical Properties of Novel Double-Barrier Metal Oxide Semiconductor Transistors
• Effects of Hydrogen and Bias on Single-Crystal Al Growth on Vicinal Si by DC Magnetron Sputtering
• Influence of Organic Contaminant on Trap Generation in Thin SiO_2 of Metal-Oxide-Semiconductor Capacitors
• Influence of Organic Contaminant on Breakdown Characteristics of MOS Capacitors with Thin SiO_2
• Effect of Light Irradiation on Native Oxidation of Silicon Surface
• Influence of Organic Contaminant on Breakdown Characteristics of MOS Capacitors with Thin SiO_2
• Design of Optically Coupled Three-Dimensional Content Addressable Memory
• Control of Fine Particulate and Gaseous Contaminants by UV/Photoelectron Method (Special Issue on Scientific ULSI Manufacturing Technology)
• Coupled Monte Carlo-Energy Relaxation Analysis of Hot Carrier Light Emission in Metal Oxide Semiconductor Field Effect Transistor's
• Coupling Characteristics of Semiconductor Coupled Quantum Dots in Coulomb Blockade Regime
• Effect of Microwave Irradiations on Coupled Quantum Dots
• Output Characteristics in an C_2H_5OH-N_2 Gas Mixture of a Gas Polarographic Oxygen Sensor Using a Zirconia Electrolyte
• Influence of Beam Current Ripple on Secondary Electron and RBS Mapping Images
• Gas Polarographic Oxygen Sensor Using the Pores of the Pt Cathode as a Gas Diffusion Barrier
• Carrier Mobility in Metal-Oxide-Semiconductor Field Effect Transistor with Atomic-Layer-Deposited Si-Nitride Gate Dielectrics
• Conduction Mechanism in Extremely Thin Poly-Si Wires : Width Dependence of Coulomb Blockade Effect
• Low-Temperature Selective Deposition of Silicon by Time-Modulation Exposure of Disilane and Formation of Silicon Nanowires
• Investigation of Surface Contamination on Silicon Oxide after Hydrofluoric Acid Etching by Noncontact Capacitance Method
• Evaluation of Surface Contamination by Noncontact Capacitance Method under UV Irradiation
• Two-Dimensional Device Simulator VENUS-2D/B for Amorphous Silicon Thin-Film Transistors Using a Gap-State Model
• Influence of Wafer Material on Defect Generation During Deep Submicron LOCOS Process
• Fabrication of spin-coat optical waveguides for optically interconnected LSI and influence of fabrication process on lower layer MOS capacitors
• Optical Modulator Using Metal-Oxide-Semiconductor Type Si Ring Resonator
• Magneto-optic Effect in Amorphous Bi_3Fe_5O_ Waveguide Sputtered at Room Temperature
• Photoelastic Effect in Silicon Ring Resonator
• Application of brush platen to uniaxial compression testing of rocklike materials
• Strategic Delegation under Quality Competition
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• Correlation Field Analysis of the Influence of Device Geometry and Bulk Disorder on Electron Interference in Quantum Wires
• Layer-by-Layer Growth of Bi-Sr-Ca-Cu-O Superconducting Films by Molecular Beam Epitaxy
• Atomic Layer Growth of Bi-Sr-Ca-Cu-O by Molecular Beam Epitaxy Using Ozone under UV Irradiation
• Modification of Radiosensitivity by Low Dose Irradiation
• A Semi-Analytical Approach to Compute the Decay of Optically Generated Carriers in Silicon Wafer
• Partial Privatization in Mixed Oligopoly with Price and Quality Competition
• Evaluation of Front-Opening Unified Pod with Attached UV/Photocatalyst Cleaning Unit
• Design and Simulation of Silicon Ring Optical Modulator with p/n Junctions along Circumference
• Sensitivity Improvement of Biosensors Using Si Ring Optical Resonators
• Detection of Antigen--Antibody Reaction Using Si Ring Optical Resonators Functionalized with an Immobilized Antibody-Binding Protein
• A Study of Mach--Zehnder Interferometer Type Optical Modulator Applicable to an Accelerometer
• Size Dependence of Universal Conductance Fluctuations in Narrow N^+ -GaAs Wires : II. LOW TEMPERATURE PROPERTIES OF SOLIDS : Localization, Mesoscopic Systems
• Implanted Antimony Precipitation in Silicon Studied by Medium-Energy Ion Scattering
• Compact Branched Optical Waveguides Using High-Index-Contrast Stacked Structure
• Stacked Optical Branched Waveguides for Optical Interconnection on Si Chips
• Influence of Sputtering Geometry on Crystallinity of Al(110) Thin Films on Offset (100)Si
• Experimental Study on Pelletized Expanded Slag Aggregate Concrete
• Regional Diversity-Multiplexing Tradeoff
• Coupling Characteristics of Semiconductor Coupled Quantum Dots in Coulomb Blockade Regime
• Dimensional Crossover of Electron-Electron Scattering in GaAs-AlGaAs Wires

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