Evaluation of Plasma-Induced Damage by Medium-Energy Ion Scattering

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-04-30

著者

• Ishibashi Koji

  Department Of Applied Physics And Dimes Delft University Of Technology:the Institute Of Physical And

• Miyazaki S

  Hiroshima Univ. Higashi‐hiroshima Jpn

• Miyazaki Seiichi

  Dept. Of Electrical Engineering Hiroshima University

• YOKOYAMA Seiji

  School of Material Science, Japan Advanced Institute of Science and Technology

• YOKOYAMA Shin

  Research Center for Nanodevices and Systems, Hiroshima University

• Yokoyama Seiji

  School Of Material Science Japan Advanced Institute Of Science And Technology

• MIYAZAKI Seiichi

  Faculty of Engineering, Hiroshima University

• HIROSE Masataka

  Faculty of Engineering, Hiroshima University

• RADZIMSKI Zbigniew

  Research Center for Integrated Systems, Hiroshima University

• ISHIBASHI Kensaku

  Faculty of Engineering, Hiroshima University

• Miyazaki Seiichi

  Faculty Of Engineering Hiroshima University

• Yokoyama Shin

  Research Center For Integrated Systems Hiroshima University

• Yokoyama S

  Research Center For Nanodevices And Systems Hiroshima University

• Radzimski Zbigniew

  Research Center For Integrated Systems Hiroshima University:(present Address)analytical Instrumentat

• Hirose Masataka

  Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And Technol

• Ishibashi K

  Advanced Device Laboratory The Institute Of Physical And Chemical Research (riken)

• Ishibashi K

  Department Of Applied Physics And Dimes Delft University Of Technology:the Institute Of Physical And

• Hirose M

  Materials Research Center Tdk Corporation

• Yokoyama S

  Kyushu Univ. Fukuoka Jpn

• Hirose Masataka

  Faculty Of Engineering Hiroshima University

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