Organic Contamination Dependence of Process-Induced Interface Trap Generation in Ultrathin Oxide Metal Oxide Semiconductor Transistors

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2003-12-01

著者

• KIKKAWA Takamaro

  Research Center for Nanodevices and Systems, Hiroshima University

• KHOSRU Quazi

  広島大学ナノデバイス・システム研究センター

• Khosru Q

  Hiroshima Univ. Higashi‐hiroshima Jpn

• Khosru Quazi

  Research Center For Nanodevices And Systems Hiroshima University

• YOKOYAMA Shin

  Research Center for Nanodevices and Systems, Hiroshima University

• Yoshino Takenobu

  Research Center For Nanodevices And Systems Hiroshima University

• SHIBAHARA Kentaro

  Research Center for Nanodevices and Systems, Hiroshima University

• NAKAJIMA Anri

  Research Center for Nanodevices and Systems, Hiroshima University

• Kikkawa Takamaro

  Research Center For Nanodevices And Systems Hiroshima University

• Yokoyama S

  Research Center For Nanodevices And Systems Hiroshima University

• SUNAMI Hideo

  Research Center for Nanodevices and Systems, Hiroshima University

• Sunami H

  Hiroshima Univ. Hiroshima Jpn

• Shibahara K

  Research Center For Nanodevices And Systems Hiroshima University

• Nakajima A

  Research Center For Nanodevices And Systems Hiroshima University

• Nomura Akihiro

  Research Center For Nanodevices And Systems Hiroshima University

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