Field-Shield Trench Isolation with Self-Aligned Field Oxide
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-30
著者
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SUNAMI Hideo
Research Center for Nanodevices and Systems, Hiroshima University
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Sunami H
Hiroshima Univ. Hiroshima Jpn
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KIDERA Toshirou
Research Center for Nanodevices and Systems, Hiroshima University
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TAKASE Akihiro
Research Center for Nanodevices and Systems, Hiroshima University
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Takase Akihiro
Research Center For Nanodevices And Systems Hiroshima University
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