Effect of Light Irradiation on Native Oxidation of Silicon Surface
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概要
- 論文の詳細を見る
- 2001-04-01
著者
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Fujii Toshiaki
Ebara Co. Ltd.
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YOKOYAMA Shin
Research Center for Nanodevices and Systems, Hiroshima University
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Yoshino Takenobu
Research Center For Nanodevices And Systems Hiroshima University
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Yokoyama S
Department Of Innovative And Engineered Materials Tokyo Institute Of Technology
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