Structural and Optical Properties of Electro-Optic Material: Sputtered (Ba,Sr)TiO3
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概要
- 論文の詳細を見る
In order to develop a novel ring resonator optical switch, we have studied the structural and optical properties of the electro-optic material (Ba,Sr)TiO3 (BST) deposited by RF sputtering on a SiO2 cladding layer (1.0 μm). The crystallinity of the BST films is evaluated by X-ray diffraction and the optical propagation loss of the waveguides is measured using a He–Ne laser. As a result, it is found that there is a strong relationship between the optical propagation loss and crystallinity of the sputtered film. It is suggested that the propagating light is influenced by the crystal property, for example, the grain size and density of the polycrystalline BST film.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-04-30
著者
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Yokoyama Shin
Research Center For Integrated Systems Hiroshima University
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Xu Zhimou
Research Center For Nanodevices And Systems Hiroshima University
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Tanushi Yuichiro
Research Center For Nanodevices And Systems Hiroshima University
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Suzuki Masato
Research Center For Nanodevices And Systems Hiroshima University
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Tanushi Yuichiro
Research Center for Nanodevices and Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashi-Hiroshima 739-8527, Japan
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