Pulsed Ion-Beam Evaporation for Thin-Film Deposition
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-02-01
著者
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SUZUKI Tsuneo
Extreme Energy-Density Research Institute, Nagaoka University of Technology
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JIANG Weihua
Extreme Energy-Density Research Institute, Nagaoka University of Technology
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YATSUI Kiyoshi
Extreme Energy-Density Research Institute, Nagaoka University of Technology
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Jiang W
Extreme Energy-density Research Institute Nagaoka University Of Technology
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Jiang Weihua
Extreme Energy-density Research Institute Nagaoka University Of Technology
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Yatsui K
Technological Univ. Nagaoka Nagaoka Jpn
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IDE Koji
Extreme Energy-Density Research Institute, Nagaoka University of Technology
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KITAYAMA Shinji
Extreme Energy-Density Research Institute, Nagaoka University of Technology
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Suzuki Tsuneo
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Yatsui Kiyoshi
Extreme Energy Density Research Institute Nagaoka University Of Technology
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Ide Koji
Extreme Energy-density Research Institute Nagaoka University Of Technology
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Kitayama Shinji
Extreme Energy-density Research Institute Nagaoka University Of Technology
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Jiang Weihua
Extreme Energy Density Research Institute, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
関連論文
- Formation of thick cubic boron nitride films in noble gases
- Effects of He Ambient on Formation of Si Particles Using Pulsed Ion-Beam Evaporation
- Effect of Ambient Gas Temperature on Synthesis of Fe-N Nanosized Powders by Pulsed Wire Discharge
- Nanosized Ferrite Particles Synthesized by Pulsed Wire Discharge
- Formation and Expansion of Ablation Plasmas Produced by Pulsed Ion Beams for Thin Films Production
- The Relationship between the Hardness and the Point-Defect-Concentration in Neutron-Irradiated MgO・3.0Al_2O_3 Single Crystals
- Enhancement of Nitridation in Synthesis of Aluminum Nitride Nanosize Powders by Pulsed Wire Discharge
- Fabrication of the finestructured alumina materials with nanoimprint method
- Effect of Wire Diameter on Particle Size of Metal Nanosized Powder Prepared by Pulsed Wire Discharge
- Blue Light Emission from Ultrafine Nanosized Powder of Silicon Produced by Intense Pulsed Ion-Beam Evaporation
- Synthesis of Fe-N Nanosized Powders by Pulsed Wire Discharge
- Synthesis of Single-Walled Carbon Nanotubes by Pulsed Wire Discharge
- Extinction of Large Droplets in Ion-Beam Ablation Plasma Produced by Ion-Beam Evaporation
- Preparation of SrAl_2O_4:Eu, Dy Phosphor Thin Films on Organic Substrates by Pulsed Ion-Beam Evaporation
- Particle Size Distribution of Copper Nanosized Powders Prepared by Pulsed Wire Discharge
- Nanosized Powder Synthesis by Pulsed Wire Discharge in High-Speed Gas Flow
- Preparation of Ti-Fe Hydrogen Storage Alloy Thin Films by Pulsed Laser Deposition
- Oxidation Resistance of Cr-N-O Thin Films Prepared by Pulsed Laser Deposition
- Modification of Graphite Surface by Intense Pulsed Ion-beam Irradiation
- Synthesis of Single-Walled Carbon Nanotubes in Various Gas by Pulsed Wire Discharge
- Reduction of Oxygen Content in Ti-Fe Thin Films Prepared by Pulsed Laser Deposition
- Deposition Process of Aluminum Thin Films by Intense Pulsed Light Ion-Beam Evaporation
- 15aQA-4 Computer Simulation of High Power Large Orbit Gyrotron (LOG)
- High Power Microwave Generation by Virtual Cathode Oscillator
- High Power Microwave Generation By New Configuration of Virtual Cathode Oscillator
- Characterization of Pulsed High-Current Generator for Extreme Ultraviolet Generation
- Pulsed High-Current Generator for EUV Source Development
- Computer Simulations of Virtual Cathode Oscillators
- Recent Trends and Prospects of Pulsed Power Technology
- Preparation of SrAl_2O_4 : Eu Phosphor Thin Films by Intense Pulsed Ion-Beam Evaporation
- Luminescent Properties of SrAl_2O_4 : Eu Thin Films Deposited by Intense Pulsed Ion-Beam Evaporation
- Preparation of Ti-Ni-N-O Thin Films by Pulsed Laser Deposition
- Foil Acceleration of Double-Layer Target by Intense Pulsed Ion Beam Ablation(Instrumentation, Measurement, and Fabrication Technology)
- Foil Acceleration of Double Layer Target by Intense, Pulsed, Ion-Beam Ablation
- Development of a Numerical Tool for Foil Acceleration by an Intense Pulsed Ion Beam
- Fine-structured ZnO patterns with sub-micrometer on the ceramic surface fabricated by a replication method
- Abrupt slope change in temperature dependence of resistivity in Ni-Fe-O sintered body (特集 環境保護に必須のナノテク材料)
- Synthesis of Al2O3 nanosized powder by pulsed wire discharge using gas puff (特集 環境保護に必須のナノテク材料)
- Preparation of Ti-Fe hydrogen storage alloy thin films by pulsed laser deposition
- Oxidation Resistance of Cr-N-O Thin Films Prepared by Pulsed Laser Deposition
- Surface Modification of Graphite Targets by Intense Pulsed Ion Beam Irradiation
- Novel Large-Area High-Resolution-Transmission-Electron-Microscopy Technique using Specimens Fabricated by a Focused Ion Beam Apparatus
- Microstructural Observation of Si_Ge_x Thin Films Prepared by Pulsed Ion-Beam Evaporation
- Preparation of Polycrystalline Silicon Thin Films by Pulsed Ion-Beam Evaporation
- Preparation of Polycrystalline Silicon Thin Films by Pulsed Ion-Beam Evaporation
- Preparation of Fullerene by Pulsed Wire Discharge
- Flue Gas Treatment by Intense Pulsed Relativistic Electron Beam
- Nanosize Al_2O_3 Powder Production by Pulsed Wire Discharge
- Synthesis of Nanosize Powders of Aluminum Nitride by Pulsed Wire Discharge
- Preparation and Characterization of C-N-H-O Thin Film by Ion Beam Evaporation
- Synthesis of Ti-Al Intermetallic Compound Films by Intense Pulsed Ion Beam Evaporation
- Preparation of B_4C Thin Film by Intense Pulsed Ion-Beam Evaporation
- Pulsed Ion-Beam Evaporation for Thin-Film Deposition
- Foil Acceleration by Intense Pulsed Ion Beam Ablation Plasma
- Pulsed Power Technology and Its Applications at Extreme Energy-Density Research Institute (EDI), Nagaoka
- Synthesis of Short Single-Walled Carbon Nanotubes by Pulsed Wire Discharge
- Critical Temperature Resistor Characteristics of Sintered Ni-Fe-O Powders
- Recent Progress in Pulse Power Technology and its Applications
- Ablation Behavior of Titanium Irradiated by High-Intensity Pulsed Ion Beams
- NO_x Treatment Using Inductive-Energy-Storage Pulsed Power Generator
- NO_x Removal Using Inductive-Energy-Storage Pulsed Power Generator
- NO Removal using Inductive-Energy-Storage Pulse Generator
- Influences of Shock Waves on High-Pressure, Pulsed Glow Discharge due to Excimer Laser Excitation
- Influences of Floating Particles Produced by High-Pressure, Pulsed Glow Discharge on Excimer Laser Excitation
- Visualization of Double-Pulse Discharge in Excimer Laser with Gas Flow
- EUV Source Development Using Pulsed High-Current Discharge
- Development of Repetitive Pulsed Power Generators Using Power Semiconductor Devices (第18回 SIデバイスシンポジウム講演論文集)
- Influence of Organic Contaminant on Breakdown Characteristics of MOS Capacitors with Thin SiO_2
- Preparation of Passivated Cu Nanosized Powders by Pulsed Wire Discharge
- Synthesis of Fe-N nanosized powders by pulsed wire discharge
- Compact Pulsed Power Generators for Industrial Applications
- Development of Pulsed High Current Generator for EUV Source Development
- Pulsed Power Generator Using Semiconductor Opening Switches
- MHz Repetitive Switching Using MOSFETs
- Development Gas Puff Apparatus for Pulsed Wire Discharge
- Characteristics of Nanosized Powders Synthesized by Pulsed Wire Discharge
- Development of Compact, Repetitive Pulsed Power Generators
- Materials Applications of Pulsed Ion-Beam-Produced Ablation Plasma
- Preparation of YBa_2Cu_3O_ Thin Films on SrTiO_3 Substrates by Pulsed Ion-Beam Evaporation
- Preparation and Characterization of B_4C Thin Film by Pulsed Ion-Beam Evaporation
- CHARACTERISTICS OF (Cr_, Al_x) N FILMS PREPARED BY PULSED LASER DEPOSITION
- Synthesis of Nanosize Powders of AlN by Pulsed Wire Discharge
- Synthesis of Nanosize Ferroelectric Powders by Pulsed Wire Discharge
- Preparation and Characterization of Cr-N-O Thin Films by Pulsed Laser Deposition
- Characteristics of (Cr_, Al_x)N Films Prepared by Pulsed Laser Deposition
- Characteristics of CrN Films Prepared by Pulsed Laser Deposition
- Aluminum Nitride Nanosized Powders Produced by Laser Ablation
- Enhancement of Energy Deposited in Wire in the Pulsed Wire Discharge for Nanosize Powders Synthesis
- Technological Trend of Compact Pulsed Power Generators
- Development of Pulsed Power Technology and Its Wide Applications
- R&D of Pulsed Power Technology and Its Applications in Japan
- Fabrication of β-SiC micropatterns from a facile replication process
- Formation and Structural Characteristic of Perpendicularly Aligned Boron Nitride Nanosheet Bridges in Polymer/Boron Nitride Composite Film and Its Thermal Conductivity
- Anisotropic alignment of non-modified BN nanosheets in polysiloxane matrix under nano pulse width electricity
- Pulsed Power Technology and Its Applications at Extreme Energy-Density Research Institute (EDI), Nagaoka
- Foil Acceleration by Intense Pulsed Ion Beam Ablation Plasma
- Synthesis of TiO2 Nanosized Powder by Pulsed Wire Discharge
- Synthesis of Single-Walled Carbon Nanotubes by Pulsed Wire Discharge
- Extinction of Large Droplets in Ion-Beam Ablation Plasma Produced by Ion-Beam Evaporation
- Determination of Submicrometer Particle Content in Copper Powder Prepared by Pulsed Wire Discharge