Development of Pulsed High Current Generator for EUV Source Development
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概要
- 論文の詳細を見る
- 2003-10-20
著者
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Jiang W
Extreme Energy-density Research Institute Nagaoka University Of Technology
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JIANG W.
Nagaoka University of Technology
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YATSUI K.
Nagaoka University of Technology
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Yatsui Kiyoshi
Laboratory Of Beam Technology And Department Of Electrical Engineering Nagaoka University Of Technol
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YATSUI K.
Extreme Energy-Density Research Institute, Nagaoka University of Technology
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OSHIMA N.
Extreme Energy-Density Research Institute, Nagaoka University of Technology
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TOKUCHI A.
Nichicon Corporation
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OSHIMA N.
Nagaoka University of Technology
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YOKOO T.
Nagaoka University of Technology
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SHIMADA K.
Nichicon Corporation
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Yatsui K
Extreme Energy-density Research Institute Nagaoka University Of Technology
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Yatsui K
Nagaoka Univ. Technology Nagaoka Jpn
関連論文
- Effects of He Ambient on Formation of Si Particles Using Pulsed Ion-Beam Evaporation
- Effect of Ambient Gas Temperature on Synthesis of Fe-N Nanosized Powders by Pulsed Wire Discharge
- Nanosized Ferrite Particles Synthesized by Pulsed Wire Discharge
- Formation and Expansion of Ablation Plasmas Produced by Pulsed Ion Beams for Thin Films Production
- Effect of Wire Diameter on Particle Size of Metal Nanosized Powder Prepared by Pulsed Wire Discharge
- Blue Light Emission from Ultrafine Nanosized Powder of Silicon Produced by Intense Pulsed Ion-Beam Evaporation
- Synthesis of Fe-N Nanosized Powders by Pulsed Wire Discharge
- Synthesis of Single-Walled Carbon Nanotubes by Pulsed Wire Discharge
- Extinction of Large Droplets in Ion-Beam Ablation Plasma Produced by Ion-Beam Evaporation
- Preparation of SrAl_2O_4:Eu, Dy Phosphor Thin Films on Organic Substrates by Pulsed Ion-Beam Evaporation
- Particle Size Distribution of Copper Nanosized Powders Prepared by Pulsed Wire Discharge
- Preparation of Ti-Fe Hydrogen Storage Alloy Thin Films by Pulsed Laser Deposition
- Oxidation Resistance of Cr-N-O Thin Films Prepared by Pulsed Laser Deposition
- Modification of Graphite Surface by Intense Pulsed Ion-beam Irradiation
- Synthesis of Single-Walled Carbon Nanotubes in Various Gas by Pulsed Wire Discharge
- Reduction of Oxygen Content in Ti-Fe Thin Films Prepared by Pulsed Laser Deposition
- Deposition Process of Aluminum Thin Films by Intense Pulsed Light Ion-Beam Evaporation
- 15aQA-4 Computer Simulation of High Power Large Orbit Gyrotron (LOG)
- Analyses of Flyer Acceleration by Intense Pulsed Ion Beam Ablation
- Ion Cyclotron Parametric Instability and Associated Ion Heating in a Two-Ion Species Plasma
- High Power Microwave Generation by Virtual Cathode Oscillator
- High Power Microwave Generation By New Configuration of Virtual Cathode Oscillator
- Characterization of Pulsed High-Current Generator for Extreme Ultraviolet Generation
- Pulsed High-Current Generator for EUV Source Development
- Compact Ar-Xe Discharge Laser with Surface Multichannel Arc Ultraviolet Preionizer
- Preparation of Ti-Ni-N-O Thin Films by Pulsed Laser Deposition
- Foil Acceleration of Double-Layer Target by Intense Pulsed Ion Beam Ablation(Instrumentation, Measurement, and Fabrication Technology)
- Foil Acceleration of Double Layer Target by Intense, Pulsed, Ion-Beam Ablation
- Preparation of Ti-Fe hydrogen storage alloy thin films by pulsed laser deposition
- Oxidation Resistance of Cr-N-O Thin Films Prepared by Pulsed Laser Deposition
- Surface Modification of Graphite Targets by Intense Pulsed Ion Beam Irradiation
- Microstructural Observation of Si_Ge_x Thin Films Prepared by Pulsed Ion-Beam Evaporation
- Preparation of Polycrystalline Silicon Thin Films by Pulsed Ion-Beam Evaporation
- Preparation of Fullerene by Pulsed Wire Discharge
- Nanosize Al_2O_3 Powder Production by Pulsed Wire Discharge
- Preparation and Characterization of C-N-H-O Thin Film by Ion Beam Evaporation
- Synthesis of Ti-Al Intermetallic Compound Films by Intense Pulsed Ion Beam Evaporation
- Preparation of B_4C Thin Film by Intense Pulsed Ion-Beam Evaporation
- Pulsed Ion-Beam Evaporation for Thin-Film Deposition
- Characteristics of Intense Pulsed Ion Beam Ablation Plasma and Its Applications to Materials Science
- Synthesis of Short Single-Walled Carbon Nanotubes by Pulsed Wire Discharge
- Critical Temperature Resistor Characteristics of Sintered Ni-Fe-O Powders
- Effect of Aperture Closure in Intense Pulsed Light Ion Beam Measurement
- Dependence of Characteristics of B_γ-Type Magnetically Insulated Diode on Configuration of Insulating Magnetic Field
- Preparation and Evaluation of Aligned Naphthacene Thin Films Using Surface Plasmon Excitation(Evaluation of Organic Materials,Towards the Realization of Organic Molecular Electronics)
- Ablation Plasma Temperature Produced by Intense, Pulsed, Ion-Beam Evaporation
- Characteristics of Ablation Plasma Produced by Intense, Pulsed, Ion Beam
- NO_x Treatment Using Inductive-Energy-Storage Pulsed Power Generator
- NO_x Removal Using Inductive-Energy-Storage Pulsed Power Generator
- NO Removal using Inductive-Energy-Storage Pulse Generator
- Parametric Excitation of an Ion Cyclotron Wave and Plasma Heating by a Modulated Electron Beam
- Parametric Excitation of a Drift Wave and Associated Ion Heating by a Modulated Ion Beam
- Proton-Beam Propagation through Wall-Confined Plasma Channel Stabilized against Sausage Instability
- Sausage Instability in a Proton-Beam Transport through Wall-Confined Plasma Channel
- Proton-Beam Transport through Wall-Confined Plasma Channel in the Nagaoka ETIGO-I
- Dynamics of Intense Pulsed Proton Beam in the Nagaoka ETIGO-I
- Transport of an Intense Pulsed Proton Beam through Wall-Stabilized Plasma Channel at Nagaoka
- Generation and Geometric Focusing of an Intense Pulsed Light-Ion Beam at Nagaoka
- Generation and Focussing of Intense Pulsed Light-Ion Beam at Nagaoka : ETIGO Project
- Numerical Study of Nonuniform Energy Deposition and Flowfield in Discharge-Pumped XeCl Excimer Laser
- EUV Source Development Using Pulsed High-Current Discharge
- Light-Ion Beam Focusing by z-Discharged Plasma Channel : Other Areas in Science and Engineering
- Development of Repetitive Pulsed Power Generators Using Power Semiconductor Devices (第18回 SIデバイスシンポジウム講演論文集)
- Preparation of Passivated Cu Nanosized Powders by Pulsed Wire Discharge
- Electrical Properties in Si_Ge_x Thin Films Prepared by Pulsed Ion-Beam Evaporation
- Synthesis of Fe-N nanosized powders by pulsed wire discharge
- Compact Pulsed Power Generators for Industrial Applications
- Development of Pulsed High Current Generator for EUV Source Development
- Pulsed Power Generator Using Semiconductor Opening Switches
- MHz Repetitive Switching Using MOSFETs
- Development Gas Puff Apparatus for Pulsed Wire Discharge
- Characteristics of Nanosized Powders Synthesized by Pulsed Wire Discharge
- Development of Compact, Repetitive Pulsed Power Generators
- Materials Applications of Pulsed Ion-Beam-Produced Ablation Plasma
- Preparation of YBa_2Cu_3O_ Thin Films on SrTiO_3 Substrates by Pulsed Ion-Beam Evaporation
- Preparation and Characterization of B_4C Thin Film by Pulsed Ion-Beam Evaporation
- CHARACTERISTICS OF (Cr_, Al_x) N FILMS PREPARED BY PULSED LASER DEPOSITION
- Synthesis of Nanosize Powders of AlN by Pulsed Wire Discharge
- Synthesis of Nanosize Ferroelectric Powders by Pulsed Wire Discharge
- Two-Dimensional Focusing of Self-Magnetically Insulated "Plasma Focus Diode"
- Preparation and Characterization of Cr-N-O Thin Films by Pulsed Laser Deposition
- Characteristics of (Cr_, Al_x)N Films Prepared by Pulsed Laser Deposition
- Enhancement of Energy Deposited in Wire in the Pulsed Wire Discharge for Nanosize Powders Synthesis
- Transversely Excited Atmospheric CO_2 Laser with Ultraviolet Preionizer Separated by Optical Window
- Triggering Characteristics of SF_6 Gas Switch by XeCl Laser
- "Time-Resolved Measurement of Energy and Species of an Intense Pulsed Ion Beam"
- "Characteristics of Intense Pulsed Ion Beam extracted from Dual-Current-Feed Magnetically-Insulated Diode"
- Propagation of Intense Pulsed Proton Beam through Wall-Initiated, Overlapping Plasma Channel
- Intense Pulsed Light-Ion Beam Generated by Planar Type Self-Magnetically Insulated Diode
- Tight Focusing of Intense Pulsed Light-Ion Beam by Spherical "Plasma Focus Diode"
- Enhancement of Proton Stopping Power on Two-Dimensionally Focused "Plasma Focus Diode"
- Measurement of Enhanced Ion Stopping Powers with Plasma Focus Diode
- Time-Resolved Spectroscopic Measurement of Anode Plasma in Magnetically-Insulated Diode
- Characteristics of High-Current Pulsed Discharge
- Two-dimensional Resin Flow Detection and Simulation Using Newly Developed Resin Front Sensor for RTM
- Repetitive Pulsed Power by Power Semiconductor Switches
- Development of SOS Generator for Atmospheric Pressure Discharge
- Preparation of Thin Films and Nanosize Powders by Intense, Pulsed Ion Beam Evaporation
- Numerical Study of Nonuniform Energy Deposition and Flowfield in Discharge-Pumped XeCl Excimer Laser
- Quick Deposition of ZuS:Mn Electroluminescent Thin Films by Intense, Pulsed, Ion Beam Evaporation