Numerical Study of Nonuniform Energy Deposition and Flowfield in Discharge-Pumped XeCl Excimer Laser

概要

論文の詳細を見る
Inhomogeneous energy deposition in a discharge-pumped excimer laser rapidly heats the gas, resulting in a nonuniform distribution of the gas temperature. Shock waves and nonuniform flowfields generated by the relaxation of the heated gas can induce discharge instabilities and limit the repetition rate of the laser. The gas temperature profile, which is necessary for the numerical study of the shock waves and flowfields, is calculated using a self-consistent discharge model. The computational results show that the temperature profile is sensitive to the electric field distribution and gas mixture. The temperature profile tends to be steeper when the nonuniformity in the electric field increases and the xenon concentration increases. Furthermore, the shock waves and unsteady flowfields are studied using two-dimensional compressible gas dynamic equations and the total variation diminishing (TVD) numerical scheme. Finally, an analysis using a blast wave model shows that the shock waves from preionization pin arrays decay rapidly.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
1997-09-15