Measurement of the Active Species Density for the Synthesis of Amorphous Carbon Nitrides I. Metastable Atoms and Electrons in the Microwave Discharge Flow of Ar

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The densities of Ar(3P2) metastable atoms and free electrons produced in the microwave (MW) discharge flow of Ar were measured. The 3P1–3P2 ($\lambda=696.5$ nm) and 3P2–3P2 ($\lambda=706.7$ nm) transitions of Ar were observed by laser-induced fluorescence (LIF) spectroscopy. The LIF intensities were calibrated against Rayleigh scattering intensity by Ar atoms. The electron density was measured by a single-probe method. The number densities of Ar(3P2) atoms and electrons were determined to be $(4.05\pm 0.05)\times 10^{14}$ m-3 and $(8.5\pm 1.5)\times 10^{15}$ m-3, respectively, under the condition of $P_{\text{Ar}}=0.1$ Torr, where $P_{\text{Ar}}$ denotes Ar pressure. When BrCN was introduced into the reaction system, the Ar(3P2) density became negligibly small, and the electron density was reduced to $(2.0\pm 0.8)\times 10^{15}$ m-3. On the basis of these observations, the decomposition process of BrCN in the MW discharge flow of Ar is discussed.
2004-10-15