Fabrication of Poly(tetrafluoroethylene) Microparts by High-Energy X-ray-Induced Etching
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概要
- 論文の詳細を見る
Poly(tetrafluoroethylene) (PTFE) microstructures' processing characteristics are studied using X-ray photo-decomposition and desorption in the highest energy region (2 to over 12 keV). While the exposed surface states are observed to melt and boil from the remaining bubble structure on the irradiated surface, the basic photochemistry of PTFE is considered to be the same as that described in previous reports, and high-aspect-ratio structures are successfully formed. We developed new Ni-electroformed stencil masks and successfully fabricated the first and practical example of PTFE microfluidic part. The characteristics of the fabricated microfluidic part, a PTFE fluid filter for vertical fluid flow operation, which works as a passive valve, agreed with the calculated results. This suggests that the accuracy of the patterning is adequate for the application of this technique to the fabrication of microfluidic parts and various other microparts.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-01-25
著者
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Kishihara Mitsuyoshi
Faculty Of Computer Science And System Engineering Okayama Prefectural University
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Utsumi Yuichi
Laboratory Of Advanced Science And Technology For Industry
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Ukita Yoshiaki
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Matsui Shinji
Laboratory Of Advanced Science And Technolgy For Industory Himeji Institute Of Technology
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Kanda Kazuhiro
Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Mochiji Kozo
Graduate School of Engineering, University of Hyogo, Himeji, Hyogo 671-2280, Japan
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Utsumi Yuichi
Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kishihara Mitsuyoshi
Faculty of Computer Science and System Engineering, Okayama Prefectural University, Soja, Okayama 719-1197, Japan
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Ukita Yoshiaki
Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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