632 Current Status of LIGA Process at "NewSUBARU"
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概要
- 論文の詳細を見る
LIGA process is a total micro-fabrication technology includes X-ray lithography, electroforming for micro metal, and replication. The replication processes like hot embossing and injection molding are very important because these techniques of a wide variety of materials for a reasonable price to micro system. For the replication process in the LIGA process, it seems to be very advantageous to use molds with smooth sidewall for release itself. We investigated the effects of controlling the beam intensity distribution for exposure changing X-ray mask tilted angle on the obtained quasi-3D resist pattern shapes. As the results, A PMMA resist master with inclined shape sidewall microstructures was successfully fabricated. Plastic products molded were evaluated with respect to the transferability and mold release.
- 一般社団法人日本機械学会の論文
著者
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Utsumi Yuichi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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HATTORI Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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MEKARU Harutaka
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Mekaru Harutaka
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Hattori Tadashi
Laboratory Of Advanced Science And Technology For Industry
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Utsumi Yuichi
Laboratory Of Advanced Science And Technology For Industry
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