Study of Demolding Characteristics in Step-and-Repeat Ultraviolet Nanoimprinting
スポンサーリンク
概要
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Ultraviolet (UV) nanoimprinting includes a contact process necessary for transferring nanoscale features from a mold to a UV-curable resist coated on a substrate. The demolding that comes with the contact process is a source of defects, and an obstacle to be overcome for nanodevice fabrications. In this study, we aim to execute more than 10000 times of step-and-repeat UV nanoimprinting with a single mold, tracing demolding forces and water contact angles of the mold surface as the indication of mold-resist/substrate interface and mold degradation. A condensable gas, a UV-curable resist, and a fluorosurfactant were considered in this study. It was revealed that 1,1,1,3,3-pentafluoropropane (PFP) or HFC-245fa, which is the common industrial name, as a condensable gas and a type of fluorosurfactant played an important role in minimizing the demolding impact and thus helped in increasing mold lifetime. The surfactant-added resists performed 6500 imprinting steps in PFP.
- 2013-06-25
著者
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Haruyama Yuichi
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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KATASE Tetsuya
Meisyo Co.
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HIROSHIMA Hiroshi
National Institute of Advanced Industrial Science and Technology
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Matsui Shinji
Laboratory Of Advanced Science And Technolgy For Industory Himeji Institute Of Technology
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Haruyama Yuichi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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KOBAYASHI Kei
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University
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NAKAGAWA Masaru
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University
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Iyoshi Shuso
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kaneko Shu
Institute of Multidisciplinary Research for Advanced Materials (IMRM), Tohoku University, Sendai 980-8577, Japan
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Tone Katsuhiko
Meisyo Co., 148 Numa, Hikami-cho, Hikami-gun, Hyogo 669-3534, Japan
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Okada Makoto
Laboratory of Advanced Science and Technology for Industry (LASTI), Graduate School of Science, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kobayashi Kei
Institute of Multidisciplinary Research for Advanced Materials (IMRM), Tohoku University, Sendai 980-8577, Japan
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Matsui Shinji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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