Fabrication of Ultrasmooth Mirrors by UV-Nanoimprint
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概要
- 論文の詳細を見る
High-reflectivity dielectric multilayer mirrors are required for applications such as femtosecond lasers, harmonic generation in an external cavity using a nonlinear crystal, gravitational-wave detection interferometers, cavity ring-down spectroscopy, and ring laser gyroscopes. Such mirrors are usually fabricated by coating a smooth optical substrate with a dielectric multilayer. In this study, we fabricated an ultrasmooth surface polymer layer on an optical substrate by UV-nanoimprint using an ultrasmooth Si mold. After coating the dielectric multilayer on the UV-nanoimprinted polymer, we obtained the reflection and transmission spectra of the multilayer on the UV-nanoimprinted polymer. The average surface roughness of the Si mold was 0.12 nm rms, while that of the UV-nanoimprinted polymer was 0.21 nm rms. The surface roughness of the dielectric multilayer mirror on the UV-nanoimprinted polymer was 0.16 nm rms. The reflectance and transmittance of the mirror on the UV-nanoimprinted polymer exceeded 99% and equaled $1.2\times 10^{-3}$%, respectively, for a wavelength of 633 nm. These values are comparable to those of a dielectric multilayer mirror on a borosilicate glass substrate.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-06-25
著者
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Fujino Hidetoshi
National Institute Of Advanced Industrial Science And Technology
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HIROSHIMA Hiroshi
National Institute of Advanced Industrial Science and Technology
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Ito Wakana
Department Of Biofunctional Chemistry Faculty Of Agriculture Kobe University
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Itatani Taro
National Institute Of Advanced Industrial Science And Technology
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Miyamoto Iwao
Department Of Applied Electronics Tokyo University Of Science
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ISHII Hiroyuki
National Institute of Advanced Industrial Science and Technology (AIST)
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Kurashima Yuichi
Department Of Applied Electronics Tokyo University Of Science
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Kurashima Yuichi
Department of Applied Electronics, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan
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Ito Wakana
Department of Applied Electronics, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan
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Hiroshima Hiroshi
National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Fujino Hidetoshi
National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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