Optimization of Processing Condition for Deposition of DLC Using FIB-CVD Method(<Special Issue>Advanced Manufacturing Technology (II))
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概要
- 論文の詳細を見る
The processing conditions for deposition of DLC using the FIB-CVD method were examined in detail. Microstructures and mechanical properties of the DLC specimens were also investigated. The deposition process of the DLC specimen is varied by the probe current of the ion beam. Through these examinations, optimum deposition condition was discussed. HRTEM image and diffraction pattern showed that the DLC specimen had amorphous structures. Young's modulus and Vickers hardness were in the range of 110-140GPa and 1100-1400 HV, respectively. These mechanical properties were obtained similarly even though the processing conditions were changed in our study.
- 2006-06-15
著者
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TANIGUCHI Jun
Department of Applied Electronics, Tokyo University of Science
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宮本 岩男
東京理科大学基礎工学部
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KOGO Yasuo
Department of Material Science and Technology, Faculty of Industrial Science and Technology, Tokyo U
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Kogo Y
Department Of Materials Science And Technology Tokyo University Of Science
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Kogo Yasuo
Department Of Material Science And Engineering Science University Of Tokyo
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Kogo Yasuo
Department Of Material Science And Technology Tokyo University Of Science
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Taniguchi Jun
Department Of Applied Electronics Tokyo University Of Science
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MIYAMOTO Iwao
Department of Applied Electronics, Tokyo University of Science
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Miyamoto Iwao
Department Of Applied Electronics Tokyo University Of Science
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Yasuno Takuya
Department Of Mechanical Engineering Iwaki Meisei University
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SAKAMOTO Naomichi
Department of Electronics and Computer Science, Iwaki Meisei University
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YAGI Takahiro
Tokyo University of Science
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Yagi Takahiro
Tokyo University Of Science:(present Address)toyota Motor Co.
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Taniguchi J
Department Of Applied Electronics Tokyo University Of Science
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Sakai N
Department Of Electronics And Computer Science Iwaki Meisei University
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宮本 岩男
東京理科大学基礎工学研究科電子応用工学専攻
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Kogo Yasuo
Department of Material Science and Technology, Tokyo University of Science
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