Deep Structure Fabrication of Silicon Utilizing High-Energy Ion Irradiation Followed by Wet Chemical Etching(M^4 processes and micro-manufacturing for science)
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概要
- 論文の詳細を見る
Etching characteristics of a silicon surface irradiated by high-energy ion beam against HF are investigated in this study. Specially designed ion irradiation facility, which enables to irradiate high-energy ion beam, is employed. A deep structure with a depth of several hundreds nanometers can be fabricated by utilizing high-energy ion irradiation. The depth of irradiated area can be controlled by adjusting acceleration voltage and ion charge, and it is related to distribution of damaged layer induced by ion irradiation. These results indicate a possibility of application as a novel deep three-dimensional nanofabrication process.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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YAMADA Shigeru
Department of Social Systems Engineering, Faculty of Engineering, Tottori University
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MORITA Noboru
Department of Chemistry, Graduate School of Science, Tohoku University
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TANIGUCHI Jun
Department of Applied Electronics, Tokyo University of Science
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Morita Noboru
Department Of Mechanical And Intellectual Systems Engineering University Of Toyama
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宮本 岩男
東京理科大学基礎工学部
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Morita Noboru
Department Of Chemistry Graduate School Of Science Tohoku University
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Yamada Shigeru
Department Of Mechanical And Intellectual Systems Engineering University Of Toyama
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Taniguchi Jun
Department Of Applied Electronics Tokyo University Of Science
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MIYAMOTO Iwao
Department of Applied Electronics, Tokyo University of Science
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Miyamoto Iwao
Department Of Applied Electronics Tokyo University Of Science
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KAWASEGI Noritaka
Graduate School of Science and Engineering, University of Toyama
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TAKANO Noboru
Department of Mechanical and Intellectual Systems Engineering, University of Toyama
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OYAMA Tatsuo
Department of Mechanical and Intellectual Systems Engineering, University of Toyama
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MOMOTA Sadao
Department of Intelligent Mechanical Systems Engineering, Kochi University of Technology
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Momota Sadao
Kochi University Of Technology
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Oyama Tatsuo
Department Of Mechanical And Intellectual Systems Engineering University Of Toyama
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Takano Noboru
Department Of Mechanical And Intellectual Systems Engineering University Of Toyama
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Taniguchi J
Department Of Applied Electronics Tokyo University Of Science
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KAWASEGI Noritaka
Toyama Industrial Technology Center
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Yamada Shigeru
Department Of Food & Health Sciences Faculty Of Human Life Sciences Jissen Women's Universi
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宮本 岩男
東京理科大学基礎工学研究科電子応用工学専攻
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Yamada Shigeru
Department of Biological Science and Technology, Science University of Tokyo
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