Crack-Free Processing of Hot-Pressed Silicon Nitride Ceramics using Pulsed YAG Laser
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概要
- 論文の詳細を見る
It is difficult to eliminate recast layers and cracks in laser-machining caramics. These defects significantly detract from the excellent properties of ceramics. This paper describes the feasibility of a crack-free processing method for hot-pressed silicon nitride (Si_3N_4) ceramics using a yttrium aluminum garnet (YAG) laser. The Q-switched YAG laser pulses controlled at below 500 ns in duration and 10 kHz in repetition rate are effective for the purpose of crack-free machining of Si_3N_4 ceramics because the thermal stress is most likely localized only in the laser-heated shallow area. The integrity of the crack-free surface is evaluated by the fracture strength and residual stress. The strength of laser-processed test pieces is reduced by 10 to 20% compared with diamond-ground ones because the high residual compression layer generated during grinding is removed.
- 一般社団法人日本機械学会の論文
- 1991-03-15
著者
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MORITA Noboru
Department of Chemistry, Graduate School of Science, Tohoku University
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Watanabe Takehiro
Department of Gene Diagnostics and Therapeutics, Research Institute, International Medical Center of
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Morita Noboru
Department Of Mechanical Engineering Faculty Of Engineering Chiba University
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Watanabe T
Nagoya Univ. Nagoya Jpn
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Morita Noboru
Department Of Chemistry Graduate School Of Science Tohoku University
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Watanabe Takehiro
Department Of Mechanical Engineering Faculty Of Engineering Chiba University
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Yoshida Y
Department Of Mechanical Engineering Faculty Of Engineering Chiba University
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YOSHIDA Yoshitaro
Department of Mechanical Engineering, Faculty of Engineering, Chiba University
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Watanabe Takehiro
Department Of Electronics And Mechanical Engineering Chiba University
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