Micromachinability of Silicon in Flowing Water using Fourth-harmonic Pulsed Nd:YAG Laser Beam and Estimation of the Shapes by Neural Network(Laser processing)

概要

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Micromachinability of silicon was investigated using the fourth-harmonic wavelength (λ=266nm, t=6ns) of a pulsed YAG laser beam. The beams were irradiated onto a silicon test piece in flowing water. The drilled surfaces were then characterized using an optical microscope, a laser interference microscope and a scanning electron microscope. Compared with atmospheric machining, problems such as reattachment of debris and molten material were improved clearly and dramatically. The relationship between the irradiation parameters and the resulting shape became quantitatively clear from the experiment. Furthermore, the presumption method of the ablated shapes was realized using the NN learned by experimental data of the limited number.
一般社団法人日本機械学会の論文
2005-10-18