Evaluation of Viscosity Characteristics of Spin-Coated UV Nanoimprint Resin

概要

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The viscosity of a UV-curable resin used in UV nanoimprint is one of the key parameters to determine the process speed of resin filling in the recesses of a mold. We have developed an apparatus to measure the viscosity of a spin-coated thin liquid film on a wafer. With this viscosity measuring apparatus we examined the effect of the film thickness, exposure of resin to atmosphere, and temperature of resin on the viscosity of PAK-01, which is a UV-curable resin commonly employed in UV nanoimprint. The viscosity of this resin with its film thickness larger than 2.3 μm showed a constant value of 83 mPa$\cdot$s, which is almost the same as that of the bulk PAK-01. At below 2.3 μm, the viscosity seemed to increase with decreasing film thickness. The viscosity of the spin-coated resin was also found to increase with the duration of its exposure to atmosphere; for a 30 min exposure to atmosphere, the viscosity reached up to 461 mPa$\cdot$s. It is considered that during the prolonged exposure, the volatile component of the resin evaporated. When subjected to heat treatment, the viscosity of the UV-curable resin did not seem to depend on film thickness and maintained a steady value of 385 mPa$\cdot$s. It was found that as the film thickness decreased the viscosity approached the value obtained by heat treatment.
2010-06-25