Growth Behavior of an Adsorbed Monolayer from a Benzophenone-Containing Trimethoxysilane Derivative on a Fused Silica Surface for Nanoimprint Molds by Chemical Vapor Surface Modification

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The formation of a monolayer from a benzophenone-containing trimethoxysilane derivative was studied to understand the growth behavior of an antisticking layer from a trimethoxysilane derivative with an alkyl long tail often used as an antisticking layer in nanoimprint lithography. An adsorbed monolayer was formed from 4-{[(3-trimethoxysilyl)propyl]oxy}benzophenone on a fused silica surface by chemical vapor surface modification (CVSM). The growth behavior of the adsorbed monolayer was monitored by UV–visible spectroscopy, and the results were compared with those obtained by contact angle measurement for water and atomic force microscopy. The monolayer formation was confirmed with absorption spectra showing a characteristic absorption band derived from a benzophenone moiety. Changes in contact angle and absorbance with an increase in CVSM period suggested that the monolayer formation was completed in 2 h. The period of 2 h suitable for CVSM was also supported by atomic force microscopy topographic images. These results suggested that the monolayer growth comprises the following three steps: the surface adsorption, condensation and packing, and excess adsorption steps.
2010-06-25