Optically Transparent and Refractive Index-Tunable ZrO2/Photopolymer Composites Designed for Ultraviolet Nanoimprinting
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概要
- 論文の詳細を見る
Epoxy-based, acrylate-based, and urethane-based ultraviolet (UV)-curable resins containing acrylate-modified zirconia nanoparticles (ZrO2-NPs) were prepared. UV-cured composite films fabricated using an acrylate-based resin and an epoxy-based resin exhibited a high transmittance {>}90% at visible and near-infrared wavelengths until the weight fraction of ZrO2-NPs having an average zirconia core diameter of 4.0 nm reached 0.66. Their refractive indices at 633 nm were widely controllable between 1.515 and 1.659 for the acrylate-based composite films and between 1.589 and 1.679 for the epoxy-based composite films. Thin films of the UV-curable composite resins could be transformed by UV nanoimprinting in pentafluoropropane using a fluorinated silica mold. Among the composite resins, the acrylate-based UV-curable composite resins showed facile workability by UV nanoimprinting. The epoxy-based UV-curable composite resins formed pattern shapes independent of the weight fraction of ZrO2-NPs. These results indicated that the acrylate-based and epoxy-based composite films with optical transparency, refractive index controllability, and workability had potential as optical materials of optical devices and as resist materials for dry etching.
- 2011-06-25
著者
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Sugihara Okihiro
Institute Of Multidisciplinary Research For Advanced Materials (imram) Tohoku University
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NAKAGAWA Masaru
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University
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Nakagawa Masaru
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai 980-8577, Japan
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Kudo Shimpei
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai 980-8577, Japan
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Nagase Koichi
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai 980-8577, Japan
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Kubo Shoichi
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai 980-8577, Japan
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Sugihara Okihiro
Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai 980-8577, Japan
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