631 Optimization of Nickel Electroplating for High Aspect Ratio LIGA Mold Inserts Fabricated by Synchrotron Radiation from "NewSUBARU"
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概要
- 論文の詳細を見る
Currently, standard molding inserts in LIGA or UV-LIGA consists of nickel. However, electroplated Ni has internal stress that leads to significant distortions in thicker deposits and it starts to recrystallize at lower annealing temperatures suffered during molding processes. We investigated optimum electroplating parameters to attain low internal stresses and high strength Ni mold inserts durable among the plastic moldings. We also demonstrated the fabrication of high aspect ratio Ni mold inserts using X-ray lithography at the Synchrotron Radiation Facility "New SUBARU" of Himeji Institute of Technology.
- 一般社団法人日本機械学会の論文
著者
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Utsumi Yuichi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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HATTORI Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Hattori Tadashi
Laboratory Of Advanced Science And Technology For Industry
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KITADANI Takeshi
SAWA Plating Industrial. Co., LTD.
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Utsumi Yuichi
Laboratory Of Advanced Science And Technology For Industry
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Kitadani Takeshi
Sawa Plating Industrial. Co. Ltd.
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Kitadani Takeshi
SAWA Plating Co., Ltd., 753 Hoshiro, Himeji, Hyogo 670-0804, Japan
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