Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-06-30
著者
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HATTORI Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Sato N
Juken Kogyo Co. Ltd.
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Hattori Tadashi
Univ. Hyogo Hyogo Jpn
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SHIMADA Osamu
SUSUMU Co., LTD.
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KUSUMI Shinji
SUSUMU Co., LTD.
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MEKARU Harutaka
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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SATO Noriaki
Juken Kogyo Co., Ltd.
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YAMASHITA Michiru
Hyogo Prefectural Institute of Technology
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Kusumi Shinji
Susumu Co. Ltd.
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Shimada Osamu
Susumu Co. Ltd.
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