Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
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概要
- 論文の詳細を見る
To produce three-dimensional and precise microstructures on a small curved surface, we developed a high-precision 3-dimensional X-ray lithography technique. We succeeded in the production of a master of a metallic mold used for mass producing a spiral microcoil with a diameter of 0.48 mm and a length of 1 mm using this technique. An exposure stage controllable by piezoelectric elements and stepping motors was developed. The adhesion between a resist material and a substrate material was enhanced. We investigated about the effect that X-ray diffraction rounds the edge of a pattern, and a process flow was produced. This product has polymethylmethacrylate (PMMA) spiral microstructures with a line width of 10 μm, a thickness of 10 μm, and a pitch of 20 μm.
- 2004-06-15
著者
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YAMASHITA Michiru
Hyogo Prefectural Institute of Technology
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Mekaru Harutaka
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Kusumi Shinji
Susumu Co. Ltd.
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Shimada Osamu
Susumu Co. Ltd.
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Sato Noriaki
Juken Kogyo Co. Ltd.
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Hattori Tadashi
Laboratory Of Advanced Science And Technology For Industry
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Yamashita Michiru
Hyogo Prefectural Institute of Technology, 3-1-12 Yukihira-cho, Suma-ku, Kobe 654-0037, Japan
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Hattori Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako-gun, Hyogo 678-1205, Japan
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Shimada Osamu
SUSUMU Co., Ltd., 14 Umamawashi-cho, Kamitoba, Minami-ku, Kyoto 601-8177, Japan
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Kusumi Shinji
SUSUMU Co., Ltd., 14 Umamawashi-cho, Kamitoba, Minami-ku, Kyoto 601-8177, Japan
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Mekaru Harutaka
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako-gun, Hyogo 678-1205, Japan
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HATTORI Tadashi
Laboratory of Advanced Science & Technology for Industry, University of Hyogo
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