Hattori Tadashi | Laboratory Of Advanced Science And Technology For Industry

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概要

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著作論文

Surface Integrity of Thick Photo Resist Finished by Ultra-Precision Diamond Cutting(Ultra-precision machining)
Enhancement of Peel Strength at Interface between Spattered Films and Substrate Materials by Fast-Atom-Beam Irradiation(M^4 processes and micro-manufacturing for science)
Fabrication of Microcoils Using X-ray Lithography and Metallizaiton
Fabrication of Spiral Micro-Coil Utilizing LIGA Process(Recent Advances in Materials and Processing [II])
633 Microfabrication of Microstructure object by plastic injection molding
Differential Phase X-ray Imaging Microscopy with X-ray Talbot Interferometer
Fabrication of a Micro Capacitive Inclination Sensor by Resin Molding
X-Ray Phase Imaging with Single Phase Grating
Investigation of High-Strength Electroformed Ni for Microprobes(Recent Advances in Materials and Processing [II])
632 Current Status of LIGA Process at "NewSUBARU"
612 Fabrication of plastic microchip for electrophoresis using UV polymerization
631 Optimization of Nickel Electroplating for High Aspect Ratio LIGA Mold Inserts Fabricated by Synchrotron Radiation from "NewSUBARU"
Manufacture of Ni Microprobe Using X-Ray Lithography and Plating Method : Behavior of Ni-plated Materials at a Constant Temperature Under Stress
Precise Micro Pattern Replication by Hot Embossing(Recent Advances in Materials and Processing [II])
Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil
Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line
Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion
Fabrication of High Aspect Ratio X-ray Grating Using X-ray Lithography
Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation
Phase Tomography by X-ray Talbot Interferometry for Biological Imaging
Effects of Improved Microchannel Structures on the Separation Characteristics of Microchip Capillary Electrophoresis
Dot Array Microoptics for Lighting Panel Using Synchrotron Radiation Lithography
Effects of Synchrotron Radiation Spectrum Energy on Polymethyl Methacrylate Photosensitivity to Deep X-ray Lithography
Fabrication of Diffraction Grating with High Aspect Ratio Using X-ray Lithography Technique for X-ray Phase Imaging
Fabrication of the X-Ray Mask using the Silicon Dry Etching

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