Fabrication of Spiral Micro-Coil Utilizing LIGA Process(<Special Issue>Recent Advances in Materials and Processing [II])
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概要
- 論文の詳細を見る
We developed a method for fabricating a three-dimensional spiral micro-inductor with high inductance using the LIGA process. The spiral inductor created had a diameter of 0.5mm, and a length of 1mm. The width of the spiral line was 10μm, the pitch was 20μm, and the number of turns was 15. It was made of plated copper. The master was a brass round bar coated with PMMA resist. Deep X-ray lithography was employed to fabricate a master for a metallic mold at the NewSUBARU synchrotron radiation facility, University of Hyogo. The inductor core was made of resin by injection molding. It has a spiral micro flute on the surface. We chose the worm injection molding technique in order to avoid the parting line across the spiral line. The worm injection molding was the method-for demolding the work such as that used in loosening a screw.
- 2006-01-15
著者
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HATTORI Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Sato N
Juken Kogyo Co. Ltd.
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Shimizu Masami
Juken Kogyo Co. Ltd.
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Hattori Tadashi
Univ. Hyogo Hyogo Jpn
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SHIMADA Osamu
SUSUMU Co., LTD.
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KUSUMI Shinji
SUSUMU Co., LTD.
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MEKARU Harutaka
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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SATO Noriaki
Juken Kogyo Co., Ltd.
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YAMASHITA Michiru
Hyogo Prefectural Institute of Technology
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Mekaru Harutaka
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Kusumi Shinji
Susumu Co. Ltd.
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Shimada Osamu
Susumu Co. Ltd.
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Sato Noriaki
Juken Kogyo Co. Ltd.
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Hattori Tadashi
Laboratory Of Advanced Science And Technology For Industry
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HATTORI Tadashi
Laboratory of Advanced Science & Technology for Industry, University of Hyogo
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