Development of Micro Capacitive Inclination Sensor

元データ 2006-12-01 社団法人 電気学会

概要

A micro capacitive inclination sensor was developed by using micro machining techniques. Electrodes of the sensor are 40 μm in a gap and 12 mm2 in area. The sensor detects difference of capacitance, which varies with movement of silicone oil accompanying with inclination of the sensor, but there is a problem of surface tension caused by the narrow gap of the electrodes. In order to solve the problem, novel structures of the sensor for injection of the oil into micro channels and retaining a horizontal plane of the oil were devised. As a result, downsizing of the sensor was realized.

著者

HATTORI Tadashi Laboratory of Advanced Science and Technology for Industry, University of Hyogo
Hattori Tadashi Univ. Hyogo Hyogo Jpn
UEDA Hiroyasu TOKAI RIKA CO., LTD.
ITOIGAWA Koichi TOKAI RIKA CO., LTD.
Ueda Hiroyasu Tokai Rika Co. Ltd.
UEDA Hiroyasu (株)東海理化
UENO Hiroshi (株)東海理化
ITOIGAWA Koichi (株)東海理化
HATTORI Tadashi 兵庫県立大学
Itoigawa Koichi Tokai Rika Co. Ltd.

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