Development of Micro Capacitive Inclination Sensor
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概要
- 論文の詳細を見る
A micro capacitive inclination sensor was developed by using micro machining techniques. Electrodes of the sensor are 40 μm in a gap and 12 mm2 in area. The sensor detects difference of capacitance, which varies with movement of silicone oil accompanying with inclination of the sensor, but there is a problem of surface tension caused by the narrow gap of the electrodes. In order to solve the problem, novel structures of the sensor for injection of the oil into micro channels and retaining a horizontal plane of the oil were devised. As a result, downsizing of the sensor was realized.
- 社団法人 電気学会の論文
- 2006-12-01
著者
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HATTORI Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Hattori Tadashi
Univ. Hyogo Hyogo Jpn
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UEDA Hiroyasu
TOKAI RIKA CO., LTD.
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ITOIGAWA Koichi
TOKAI RIKA CO., LTD.
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Ueda Hiroyasu
Tokai Rika Co. Ltd.
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UEDA Hiroyasu
(株)東海理化
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UENO Hiroshi
(株)東海理化
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ITOIGAWA Koichi
(株)東海理化
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HATTORI Tadashi
兵庫県立大学
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Itoigawa Koichi
Tokai Rika Co. Ltd.
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