Fabrication of Diffraction Grating with High Aspect Ratio Using X-ray Lithography Technique for X-ray Phase Imaging
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-02-15
著者
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HATTORI Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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NODA Daiji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Noda Daiji
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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TANAKA Makoto
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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SHIMADA Kazuma
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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