Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion

概要

論文の詳細を見る
Reliable joining technologies are essential for fabrication of microstructures such as micro-machines, and particularly technologies that are capable of jointing different types of materials. However, these technologies cannot be used for materials that have different rates of thermal expansion or in cases where the adhesives have an effect on the properties of the component materials. Our research focused on developing a direct jointing technology which employs hydrogen bonding. In this technology, OH radicals are absorbed into the surface of the material to be bonded by modifying its surface properties by ion irradiation. We studied the modification of the surface properties of two resins, (SU-8 and PMMA) by H2O ion irradiation and Ar cleaning. It was confirmed that the presence of H2O ions on the surface of these resins improved their hydrophilic properties and also the peel strengths of Cu membrane s deposited onto both resins. Based on the results of these studies, a series of experiments were conducted in which two different materials, (copper plus one or other of the resins) were joined directly and the results were evaluated. Each of the resins could be joined to copper by heating to a temperature of 100°C and pressurizing to 10 MPa. This jointing technology will now be applied to the fabrication of the tilt sensors that we are currently developing.