Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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HATTORI Tadashi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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Sato N
Juken Kogyo Co. Ltd.
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Shimizu Masami
Juken Kogyo Co. Ltd.
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Hattori Tadashi
Univ. Hyogo Hyogo Jpn
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SHIMADA Osamu
SUSUMU Co., LTD.
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KUSUMI Shinji
SUSUMU Co., LTD.
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MEKARU Harutaka
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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SATO Noriaki
Juken Kogyo Co., Ltd.
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YAMASHITA Michiru
Hyogo Prefectural Institute of Technology
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Kusumi Shinji
Susumu Co. Ltd.
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Shimada Osamu
Susumu Co. Ltd.
関連論文
- Surface Integrity of Thick Photo Resist Finished by Ultra-Precision Diamond Cutting(Ultra-precision machining)
- Enhancement of Peel Strength at Interface between Spattered Films and Substrate Materials by Fast-Atom-Beam Irradiation(M^4 processes and micro-manufacturing for science)
- Fabrication of Microcoils Using X-ray Lithography and Metallizaiton
- Fabrication of Spiral Micro-Coil Utilizing LIGA Process(Recent Advances in Materials and Processing [II])
- Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil
- Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
- 633 Microfabrication of Microstructure object by plastic injection molding
- Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation
- Differential Phase X-ray Imaging Microscopy with X-ray Talbot Interferometer
- X-ray Fluorescence Analysis of Cr^ Component in Mixtures of Cr_2O_3 and K_2CrO_4