Nanomechanical Switch formed by Focused-Ion-Beam Chemical Vapor Deposition
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概要
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Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming a free-space-nanowiring. At 295 K the electrical resistivity of a free-space-nanowiring made using phenanthrene as the source gas was $1\times 10^{2}$ $\Omega$ cm. Adding tungsten hexacarbonyl to the phenanthrene reduced the electrical resistivity to $2\times 10^{-2}$ $\Omega$ cm. The nanomechanical switch composed of a coil and a nanowiring has been fabricated by using free-space-nanowiring fabrication technology, and its operation has been confirmed by applying a voltage.
- 2005-05-15
著者
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Kanda Kazuhiro
University Of Hyogo Laboratory Of Advanced Science And Technology For Industry
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MORITA Takahiko
University of Hyogo, Graduate School of Science, LASTI
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Matsui Shinji
University Of Hyogo
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Kanda Kazuhiro
University of Hyogo, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Haruyama Yuichi
University of Hyogo, Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Morita Takahiko
University of Hyogo, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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