Deposition Rate of Boron Nitride Films Using Plasma Jet Technique
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-11-15
著者
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SAITOH Hidetoshi
Department of Chemistry, Nagaoka University of Technology
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Saitoh Hidetoshi
Department Of Bioresource Science Obihiro University Of Agriculture And Veterinary Medicine
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Morino Hiroki
Nagaoka University Of Technology
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Saitoh Hidetoshi
Department Of Material Science Faculty Of Engineering Ibaraki University
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ICHINOSE Yukio
Nagaoka University of Technology
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