Measurement of the Active Species Density for the Synthesis of Amorphous Carbon Nitrides I : Metastable Atoms and Electrons in the Microwave Discharge Flow of Ar
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-10-15
著者
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Ito Hiroki
Depatment Of Materials Sci. And Technol. Nagaoka Univ. Of Technol.
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Sato Yoshinori
Department of Environmental Infectious Diseases, Graduate School of Medical Sciences, Kitasato Unive
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Saitoh Hidetoshi
Crest Japan Science And Technology Agency
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SAITOH Hidetoshi
Department of Chemistry, Nagaoka University of Technology
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Ito Haruhiko
Department Of Physics Faculty Of Science Kyoto University
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Shimotono Hidetoshi
Department Of Physics Kyoto University
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Saitoh Hidetoshi
Department Of Chemistry Nagaoka University Of Technology
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