E5 Improvement of Vibration Characteristics of Silicon Resonators by Means of Surface Treatment(Other manufacturing-related technologies)
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概要
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The relationship between the surface state and vibration characteristics of Si cantilever was examined. Surface treatment of Si cantilever was carried out by reactive ion etching (RIE) using CF_4, Ar and O_2 gases. It was found that the Q factors increased when we used CF_4 gas, and they decreased when we used Ar or O_2 gas. The changes in chemical bond state were measured by the X-ray photoelectron spectroscopy (XPS). In addition, the surface free energy of the cantilever was measured. As a result, lower surface free energies resulted in larger Q factors.
- 2009-12-01
著者
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Shimizu Hiroki
Department of Mechanical Engineering, School of Engineering, the University of Tokyo
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Delaunary Jean-Jacques
Department of Mechanical Engineering, School of Engineering, the University of Tokyo
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Kometani Reo
Department of Mechanical Engineering, School of Engineering, the University of Tokyo
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Warisawa Shinichi
Department of Mechanical Engineering, School of Engineering, the University of Tokyo
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Ishihara Sunao
Department of Mechanical Engineering, School of Engineering, the University of Tokyo
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Kometani Reo
Univ. Tokyoi Tokyo Jpn
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Kometani Reo
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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Ishihara Sunao
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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Warisawa Shinichi
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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Delaunary Jean-jacques
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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Shimizu Hiroki
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
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Shimizu Hiroki
Department Of Applied Biological Chemistry Graduate School Of Agricultural And Life Sciences The Uni
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Kometani Reo
Department of Engineering Synthesis, The University of Tokyo
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Ishihara Sunao
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
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