High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain
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概要
- 論文の詳細を見る
- 2012-11-25
著者
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Kometani Reo
Department of Engineering Synthesis, The University of Tokyo
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Ishihara Sunao
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
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OSHIDARI Yuta
Department of Mechanical Engineering, The University of Tokyo
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HATAKEYAMA Taiki
Department of Materials Engineering, The University of Tokyo
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WARISAWA Shin'ichi
Department of Human and Engineered Environmental Studies, The University of Tokyo
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