Evaluation Method of the Quality Factor of Micromechanical Resonators Using Electron Beams
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概要
- 論文の詳細を見る
An application of electron beams was examined to evaluate vibrational characteristics. The relationship between the secondary electron intensities and the amplitude of mechanical resonators has been unclear. In this study, the relationship was investigated to evaluate the amplitude and the quality factor using the electron beam method. An expression to estimate the amplitude from the signal intensity was developed by modeling the secondary electron signal as a pulse wave. Conversion of the signal intensities to amplitudes enabled us to evaluate the quality factor. Then, experiments comparing the amplitude of a microcantilever estimated using the electron beam method to that directly measured from the scanning electron microscope image were conducted. The estimated and directly measured amplitudes agreed well, and the quality factors evaluated from both amplitudes also agreed well. Thus, we conclude that the electron beam method can reliably evaluate the quality factor of mechanical resonators.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-06-25
著者
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Ashiba Hiroki
Department Of Mechanical Engineering The University Of Tokyo
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Ishihara Sunao
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
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Ashiba Hiroki
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
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Warisawa Shin'ichi
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
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