D34 Dynamic Property Evaluation of Nano/Micro Mechanical Resonators Utilizing Frequency-modulated Secondary Electron Signals(Nano/micro measurement and intelligent instruments)
スポンサーリンク
概要
- 論文の詳細を見る
An application of electron beams for evaluations of vibrational characteristics of mechanical resonators was investigated. Expressing Frequency-modulated secondary electron signals as the composition of pulse waves, an expression to evaluate amplitudes of the resonators from the signal intensity was developed. Experiments evaluating amplitude of a microcantilever using the electron beam method based on the proposed theory were conducted. Comparison of the evaluated amplitudes and the directly measured amplitudes obtained from images of a scanning electron microscope good agreement, thus we conclude that the electron beam method can reliably evaluate the vibrational characteristics of mechanical resonators.
- 一般社団法人日本機械学会の論文
- 2009-12-01
著者
-
Ishihara Sunao
Department of Mechanical Engineering, School of Engineering, the University of Tokyo
-
Ishihara Sunao
Department Of Mechanical Engineering School Of Engineering The University Of Tokyo
-
Ishihara Sunao
Department Of Mechanical Engineering The University Of Tokyo
-
ASHIBA Hiroki
Department of Mechanical Engineering, The University of Tokyo
-
Ashiba Hiroki
Department Of Mechanical Engineering The University Of Tokyo
-
Warisawa Shin'ichi
Department Of Mechanical Engineering The University Of Tokyo
-
Ishihara Sunao
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
-
Ashiba Hiroki
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
関連論文
- E5 Improvement of Vibration Characteristics of Silicon Resonators by Means of Surface Treatment(Other manufacturing-related technologies)
- D34 Dynamic Property Evaluation of Nano/Micro Mechanical Resonators Utilizing Frequency-modulated Secondary Electron Signals(Nano/micro measurement and intelligent instruments)
- Electromechanical displacement detection with an on-chip high electron mobility transistor amplifier (Special issue: Microprocesses and nanotechnology)
- Giant Magneto-Piezoresistance and Internal Friction in a Two-Dimensional Electron System
- High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain
- Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy
- Evaluation Method of the Quality Factor of Micromechanical Resonators Using Electron Beams
- High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain