High-Temperature MBE Growth of Si-Direct Current Heating Effects on (111) and (001) Vicinal Surfaces

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-05-15

著者

• Ishida M

  Sii Nanotechnology Inc.

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C

• Ichikawa Mitsuru

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• Stoyanov S

  Hitachi Ltd. Tokyo

• Stoyanov Stoyan

  Central Research Laboratory Hitachi Ltd.:(pressent Address)institute Of Physical Chemistry Bulgarian

• Stoyanov Stoyan

  Central Research Laboratory Hitachi Ltd.

• ICHIKAWA Masakazu

  Central Research Laboratory, Hitachi Lid.

• Doi Takahisa

  Central Research Laboratory, Hitachi Ltd.

• IWASA Masayuki

  SII Nanotechnology Inc.

• Ichikawa Masakazu

  Central Research Laboratory

• Doi Takahisa

  Central Research Laboratory

• Doi Takahisa

  Central Research Laboratory Hitachi Ltd.

• Iwasa Masayuki

  Sii Nanotechnology Inc. Tokyo Jpn

関連論文

• A highly efficient sublimation purification system using baffles with orifices
• Sensitization of organic photovoltaic cells based on interlayer excitation energy transfer
• Thin-film and single-crystal transistors based on a trifluoromethyl-substituted alternating (thiophene/phenylene)-co-oligomer
• Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
• Amorphous-to-Polycrystalline Silicon Transition in Hot Wire Cell Method
• Fabrication of Nanomanipulator with SiO_2/DLC Heterostructure by Focused-Ion-Beam Chemical Vapor Deposition
• Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
• Electron-Beam-Induced Selective Thermal Decomposition of Ultrathin SiO_2 Layers Used in Nanofabrication
• Polycrystalline Cu(InGa)Se_2 Thin-Film Solar Cells with ZnSe Buffer Layers
• Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars
• Growth Manner and Mechanical Characteristics of Amorphous Carbon Nanopillars Grown by Electron-Beam-Induced Chemical Vapor Deposition
• Position-Controlled Carbon Fiber Growth Catalyzed Using Electron Beam-Induced Chemical Vapor Deposition Ferrocene Nanopillars
• Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition
• Structure and Resonant Characteristics of Amorphous Carbon Pillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition
• Fused thiophene-split oligothiophenes with high ionization potentials for OTFTs
• Spectral Characteristics of Thin-Film Stacked-Tandem Solar Modules
• A molecular thermometer based on luminescence of copper(II) tetraphenylporphyrin
• High coupling efficiency of microcavity organic light-emitting diode with optical fiber for as light source for optical interconnects
• Organic Thin-Film Transistors with Conductive Metal-Oxides as Source-Drain Electrodes
• Field-effect Characteristics of a One-dimensional Platinum Chain Compound, Bis(1,2-benzoquinonedioximato)platinum(II)
• Light Emission from Organic Single-Crystal Field-Effect Transistors
• Electroluminescence Spikes of Pulsed Organic Light-Emitting Diodes at Switch-Off Using 1, 4-Bis[2-[4-[N, N-di(p-tolyl)amino]phenyl]vinyl]benzene as a Light-Emitting Layer
• Lead Halide-based Layered Perovskites Incorporated with a p-Terphenyl Laser Dye
• Use of Trapezoid Pulse Voltage in Study of Transient Response of Organic Light-Emitting Diodes
• Organic Field-Effect Transistor of (Thiophene/Phenylene) Co-Oligomer Single Crystals with Bottom-Contact Configuration
• Relationship between Molecular Skeleton and Stimulated-emission Threshold in Dilute Thin Films of Linear-chain-structured Fluorescent Dyes
• Self-Developing Properties of an Inorganic Electron Beam Resist and Nanometer-Scale Patterning Using a Scanning Electron Beam
• Electron-Stimulated Desorption and in situ Scanning Electron Microscopy Study on Self-Developing Reaction of High-Resolution Inorganic Electron Beam Resist
• Micro-Probe Reflection High-Energy Electron Diffraction Technique. : III. Observation of Polycrystalline Silicon Film on Crystalline Silicon Substrate Irradiated by Continuous-Wave Ar^+-Laser
• Generalized Bethe Potential in Reflection Electron Diffraction
• Characterization of Laser-Induced Epitaxial Si Crystal by Evaluating MOSFET's Fabricated in Grown Layers : A-6: SILICON CRYSTALS
• Layer-by-Layer Oxidation of Si(001) Surfaces
• Method of Measuring Charge Carrier Mobility in Organic Light-Emitting Diodes Using Fast Transient Electroluminescence Responses (Short Note)
• Observation of Surface Micro-Structures by Micro-Probe Reflection High-Energy Electron Diffraction
• High Deposition Rate of Polycrystalline Silicon Thin Films Prepared by Hot Wire Cell Method
• High-Temperature MBE Growth of Si-Direct Current Heating Effects on (111) and (001) Vicinal Surfaces
• Dynamics of Step Bunching Induced by DC Resistive Heating of Si Wafer
• Diffusion Constants of Si Adsorbates on a Si(001) Surface
• Observation of Si(001) Surface Domains in Absorption Current Images of an Electron Microscope
• Observation of 1-nm-High Structures on a Si (001) Surface Using a Differential Interference Optical Microscope
• Low-Threshold Photopumped Distributed Feedback Plastic Laser Made by Replica Molding
• Room Temperature Nanoimprint Technology Using Hydrogen Silsequjoxane (HSQ)
• Exciton Dynamics in Organic Semiconductor Devices : Investigation of Exciton-Charge Carrier Interactions as Revealed by Photoluminescence Responses(Atoms, Molecules, Chemical Physics)
• Photopumped Organic Solid-State Dye Laser with a Second-Order Distributed Feedback Cavity : Optics and Quantum Electronics
• Anisotropic Diffusion of Si Adsorbates on a Si (001) Surface
• High Dose Rate Effect of Focused-Ion-Beam Boron Implantation into Silicon
• Direct Observation of Electron Charge of Si Atoms on a Si(001) Surface
• Evaluation of fluorinated diamond like carbon as antisticking layer by scanning probe microscopy
• Sub-10-nm-Scale Lithography Using p-chloromethyl-methoxy-calix[4]arene Resist
• Investigating Line-Edge Roughness in Calixarene Fine Patterns Using Fourier Analysis
• Mechanism of Layer-by-Layer Oxidation of Si(001)Surfaces by Two-Dimensional Oxide-Island Nucleation at SiO_2/Si Interfaces
• Mechanism of Layer-by-Layer Oxidation of Si (001) Surfaces Proceeding by Two-Dimensional Oxide-Island Nucleation at SiO_2/Si Interfaces
• 28p-ZF-1 Step bunching in MBE growth of Si induced by dc resistive heating - a theoretical model.
• Nanostructure Fabrication Based on Sporntaneous Formation Mechanisms
• Observation of Magnetic Induction Distribution by Scanning Interference Electron Microscopy
• Micro-Probe Reflection High-Energy Electron Diffraction Technique. : I. Determination of Crystallographic Orientations of Polycrystal-Silicon Surfaces
• Micro-Probe Reflection High-Energy Electron Diffraction Technique. : II. Observation of Aluminum Epitaxial Growth on a Polycrystal-Silicon Surface by Vacuum Evaporation
• Contrast Behavior of the Laue-Case Kikuchi Pattern in Reflection Electron Diffraction
• Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy

もっと見る 閉じる

スポンサーリンク