Dynamics of Step Bunching Induced by DC Resistive Heating of Si Wafer

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-01-15

著者

• Nakahara H

  Department Of Chemistry Tokyo Metropolitan University

• Stoyanov Stoyan

  Central Research Laboratory Hitachi Ltd.:(pressent Address)institute Of Physical Chemistry Bulgarian

• Stoyanov Stoyan

  Central Research Laboratory Hitachi Ltd.

• ICHIKAWA Masakazu

  Central Research Laboratory, Hitachi Lid.

• Ichikawa Masakazu

  Central Research Laboratory

• NAKAHARA Hitoshi

  Central Research Laboratory, Hitachi, Ltd.

• Nakahara Hitoshi

  Central Research Laboratory Hitachi Ltd.

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• High-Temperature MBE Growth of Si-Direct Current Heating Effects on (111) and (001) Vicinal Surfaces
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