Micro-Probe Reflection High-Energy Electron Diffraction Technique. : I. Determination of Crystallographic Orientations of Polycrystal-Silicon Surfaces
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概要
- 論文の詳細を見る
A micro-probe reflection high-energy electron diffraction (RHEED) apparatus including an electron gun with a probe size of 0.1μm operated under ultrahigh vacuum, has been constructed. This makes it possible to obtain bright, sharp diffraction patterns from micro-areas of clean surfaces, and to take RHEED-microscope images of crystal surfaces. Using this apparatus, a technique for determining the crystallographic orientations of surface micro-areas within an accuracy of ±1° has been developed. This is done by analyzing Kikuchi patterns emitted at low angles, and spatial distributions having various crystallographic orientations are obtained by taking RHEED-microscope images. From the results of applying this technique to polycrystal-Silicon surfaces, it is found that it is very useful in determining the crystallographic orientations of surface micro-areas.
- 社団法人応用物理学会の論文
- 1982-01-05
著者
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Hayakawa Kazunobu
Central Research Laboratory Hitachi Ltd.
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Hayakawa Kazunobu
Central Research Laboratory Hitachi Lid.
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Ichikawa Masakazu
Central Research Laboratory
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