28p-ZF-1 Step bunching in MBE growth of Si induced by dc resistive heating - a theoretical model.
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概要
- 論文の詳細を見る
- 社団法人日本物理学会の論文
- 1992-03-12
著者
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Stoyanov Stoyan
Central Research Laboratory Hitachi Ltd.:(pressent Address)institute Of Physical Chemistry Bulgarian
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Stoyanov Stoyan
Central Research Laboratory Hitachi Ltd.
関連論文
- High-Temperature MBE Growth of Si-Direct Current Heating Effects on (111) and (001) Vicinal Surfaces
- Dynamics of Step Bunching Induced by DC Resistive Heating of Si Wafer
- 28p-ZF-1 Step bunching in MBE growth of Si induced by dc resistive heating - a theoretical model.