Atomic-Scale Structure of SiO_2/Si(001) Interface Formed by Furnace Oxidation
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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Ichikawa Masakazu
Joint Research Center For Atom Technology
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Watanabe Heiji
Fundamental Research Laboratories Nec Corporation
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Miyata Noriyuki
Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C/o National I
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Ichikawa Masakazu
Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C/o National I
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