Growth Manner and Mechanical Characteristics of Amorphous Carbon Nanopillars Grown by Electron-Beam-Induced Chemical Vapor Deposition
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概要
- 論文の詳細を見る
We investigated the growth manner and mechanical characteristics of amorphous carbon (a-C) nanopillars formed by electron-beam-induced chemical vapor deposition (EB-CVD). The pillars' inclinations were well explained if we assumed the vertical growth rate to be almost constant within a specified distance from the substrate. The pillars' Young's modulus evaluated by deflection measurement was approximately 29 GPa, which was almost equivalent to that of bismuth, but much smaller than that observed in focused ion-beam-induced chemical vapor deposition (FIB-CVD) pillars.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-15
著者
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ISHIDA Masahiko
CREST JST, Japan Science and Technology Co.
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OCHIAI Yukinori
CREST JST, Japan Science and Technology Co.
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OKADA Satoshi
CREST-JST
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MUKAWA Takahito
CREST-JST
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KOBAYASHI Ryota
CREST-JST
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MATSUI Shinji
CREST-JST
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ICHIHASHI Toshinari
CREST JST, Japan Science and Technology Co.
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Kaito Takashi
Crest Japan Science And Technology Agency
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Fujita Jun-ichi
CREST JST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
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Ishida Masahiko
CREST JST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
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Kobayashi Ryota
CREST JST, Japan Science and Technology Co., 4-1-8, Hon-cho, Kawaguchi, Saitama 332-0012, Japan
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Kaito Takashi
CREST JST, Japan Science and Technology Co., 4-1-8, Hon-cho, Kawaguchi, Saitama 332-0012, Japan
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Matsui Shinji
CREST JST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
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Okada Satoshi
CREST JST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
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Mukawa Takahito
CREST JST, Japan Science and Technology Co., 4-1-8, Hon-cho, Kawaguchi, Saitama 332-0012, Japan
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