Hirayama Makoto | Ulsi Laboratory Mitsubishi Electric Corporation
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概要
関連著者
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Hirayama Makoto
Ulsi Laboratory Mitsubishi Electric Corporation
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Hirayama M
Ulsi Laboratory Mitsubishi Electric Corporation
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HIRAYAMA Makoto
ULSI Laboratory, Mitsubishi Electric Corporation
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Hirayama Makoto
Lsi R&d Lab. Mitsubishi Electric Corp.
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Kobayashi K
Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative
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KOBAYASHI Kiyoteru
ULSI Laboratory, Mitsubishi Electric Corporation
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Kobayashi K
Kobe Steel Ltd. Kobe Jpn
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Kamigaki K
College Of Liberal Arts Toyama University
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Kudoh Kazuhide
Department Of Applied Physics Tokyo University Of Science
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Yasuoka Akihiko
Ulsi Laboratory Mitsubishi Electric Corporation
著作論文
- Impact of Organic Contaminants from the Environment of Electrical Characteristics of Thin Gate Oxides
- Highly Reliable SiO_2 Films Formed by UV-O_2 Oxidation
- High-Quality CVD/Thermal Stacked Gate Oxide Films with Hydrogen-Free CVD SiO_2 Formed in a SiCl_4-N_2O System
- Electron Beam Direct Writing Techniques for the Development of Sub-Quarter-Micron Devices
- Refractive Index Distribution in Photoresist Thin Film Formed by the Spin Coating Method
- Adhesion Improvement of Photoresist on TiN/Al Multilayer by Ozone Treatment