A Simple Ohmic-Contact Formation Technology using Phosphine Plasma Treatment for Top-Gate Amorphous-Silicon Thin-Film Transistors

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A Simple Ohmic-Contact Formation Technology using Phosphine Plasma Treatment for Top-Gate Amorphous-Silicon Thin-Film Transistors
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A Simple Ohmic-Contact Formation Technology using Phosphine Plasma Treatment for Top-Gate Amorphous-Silicon Thin-Film Transistors

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