Correlation between X-Ray Reflectivity and Rutherford Backscattering Spectroscopy for Density Measurement of Thin Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-01-15

著者

• ARAI Toshihiro

  Institute of Applied Physics, The University of Tsukuba

• FUJIWARA Shuzo

  National Institute of Materials and Chemical Research

• AOKI Sadao

  Institute of Applied Physics, University of Tsukuba

• Aoki S

  Univ. Tsukuba Ibaraki

• Aoki Sadao

  Institute Of Applied Physics University Of Tsukuba

• Aoki S

  Institute Of Applied Physics University Of Tsukuba

• Kudo Hiroshi

  Institute Of Applied Physics University Of Tsukuba

• NAKAJIMA Kunio

  Seiko Instruments Inc.

• SUDO Shuzo

  Seiko Instruments Inc.

• Aoki S

  Kyushu Inst. Technology Fukuoka

• Fujiwara S

  National Institute Of Materials And Chemical Research

• MONDO Munehiro

  Institute of Applied Physics, University of Tsukuba

• FUJIWARA Shiro

  Institute of Applied Physics, University of Tsukuba

• Sudo S

  Nec Compound Semiconductor Devices Ltd. Shiga Jpn

• Fujiwara Shiro

  Institute For Optical Research Tokyo University Of Education

• Arai Toshihiro

  Institute For Optical Research Kyoiku University

• Mondo Munehiro

  Institute Of Applied Physics University Of Tsukuba:(present Address) Sharp Corporation

• Saji A

  Chubu Electric Power Co. Nagoya

• Aoki Sadao

  Department Of Pure And Applied Science College Of General Education University Of Tokyo:(present Add

• Arai Toshihiro

  Institte For Optical Research Kyoiku University

• Kanda H

  Univ. Tsukuba Ibaraki

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