Triangular Shaped Beam Technique in EB Exposure System EX-7 for ULSI Pattern Formation
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概要
- 論文の詳細を見る
The generation of a triangular and rectangular shaped beam is very useful in increasing throughput for writing ULSI patterns which often include many oblique lines. To make use of these shaped beams in ULSI pattern formation, a new rectangular and triangular shaped beam calibration method has been developed on the EB exposure system EX-7. The shaped beam calibration method is established by analyzing the beam current of shaped beams and the backscattered electron signal from a fine gold particle on the target. Resultant accuracies were 0.013 $\mu$m for a beam size of 1.6 $\mu$m and 0.025 $\mu$m for the relative beam position on the target. Using this method, 0.2 $\mu$m ULSI patterns including oblique lines have been accurately formed.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-10-20
著者
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HATTORI Kiyoshi
ULSI Research Labs., R&D Center, Toshiba Corporation
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Ikenaga Osamu
Ulsi Research Center Toshiba Corporation
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WADA Hirotsugu
ULSI Research Laboratories, Toshiba Corporation
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Nishimura Eiji
Ulsi Research Center Toshiba Corporation
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Tamamushi Syuichi
Ulsi Research Center Toshiba Corporation
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Takigawa Tadahiro
Ulsi Research Center Toshiba Corp
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Ikeda Naotaka
Ulsi Research Center Toshiba Corporation
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Katoh Yoshihide
Ulsi Research Center Toshiba Corporation
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Kusakabe Hideo
Ulsi Research Center Toshiba Corporation
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Yoshikawa Ryoichi
Ulsi Research Center Toshiba Corporation
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Ikenaga Osamu
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
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Takigawa Tadahiro
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
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Wada Hirotsugu
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
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Tamamushi Syuichi
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
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Hattori Kiyoshi
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
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Yoshikawa Ryoichi
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
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